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Keyword [micro-machining technology]
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1. Study On The Design And Fabrication Of Solid Micro Thruster Based On MEMS
2. Study Of SMA Micro-actuator And Bi-stable MEMS Relay
3. Research On Turbulence Effect Of Spiral Structure Micromixer
4. Microfabrication Of Alkali-metal Vapor Cells For Chip-scale Atomic Clock
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