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Keyword [micromachining]
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1. Fence Structure Micromachining Vibratory Rate Gyroscope
2. Study Of The Design And Fabrication Of The MEMS-DMs
3. Design, Fabrication And Dynamic Testing Of Novel Si-Based MEMS Torsion-Mirror Optical Actuators
4. An Electro Thero-Actuated Bidirectional Bistable Mems Relay And Its Integrated Micro Fabrication
5. MEMS Key Technologies For PEMFC And The Stack
6. Design And Fabrication Of An Accelerometer With Novel "8-beams/mass" Structure
7. The Research Of Self-Excited Driving Circuit Of Micromachining Gyroscope
8. Analyses Of A Novel Grid Strip Biaxial MEMS Inertial Sensor
9. Mach - Zehnder Interferometer Based On Dual - Core Fiber And Its Application In Sensing
10. Research On Key Technology Of LTCC Micromachined Differential Capacitance Accelerometer
11. Mems Micro-deformable Mirror Design And Thin Film Residual Stress Control Study
12. Design, Analysis And Preparation Of Test Device For Fatigue Analysis Of MEMS Based On The Bulk Micromachining
13. Research On Parameters Optimization And Key Technology Of The Slapper Detonators
14. Micro Electrochemical Machining Technology For Shaped Grooves Of Engine Fuel Nozzles
15. Study On The Machining Of Micro-nano Optical Array Elements Of Silicon By The CELT
16. Optimization Design And Fabriation Of Unidirectional MEMS Inertial Switches
17. Design Manufacture Of Piezoelectric And Electromagnetic Hybrid Micro Power Generator With Low Frequency Response
18. Research On Micromachining Method And Its Application Based On An Adhesive Dispenser
19. The Research And Design Of MEMS Optical Switch For Laser Ignition System
20. Simulation And Technological Optimization Of The Micro-machining Of Graphene Reinforced Aeronautical Metal Matrix Composites
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