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Keyword [CZSi]
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1. Investigation On Micro-defects In Large-diameter CZSi Crystal Used For Sub-micro IC
2. Î¦200mm Low Oxygen & Carbon Concentration CZSi Crystal Growth And The Computer Simulation
3. Improvement Of Φ8" Hot Zone For Φ8" CZSi And The Numeric Simulaion
4. Investigation Of Oxygen Precipitate And Induced-Defects In Fast Neutron Irradiated Nitrogen-Doped Czochralski Silicon
5. Distribution And Control Method Of Oxygen And Carbon In CZSi
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