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Keyword [trench etching]
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1. Investigation On Trench Etching In SiCOH Low-k Films By C2F6/O2/Ar Dual-frequency Capacitively Coupled Plasma
2. Investigations On SiC Super Junction Schottky Diodes
3. Simulation of polymer-deposition controlled trench etching in silicon
4. Theoretical And Technological Research On SiC Super-Junction Schottky Diodes
5. Development Of ESD Diode Deep Trench Isolation Technology Process Platform
6. Research On GAN Power Die Device Applied In Base Station
7. Performance Characterization Research Of Key Processes Of Silicon Photomultiplier
8. Performance Limit Relationship And Key Process Technology Of SiC Superjunction Devices
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