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Keyword [wafer transfer robot]
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1. Contact Properties Analysis And Design Of End Effector For Large-Size Wafer Transfer Robot
2. Key Control Technique Of Wafer Handling Robot
3. Research On The Robust Control Technology For The Wafer Transfer Robot
4. Research On Control Strategy Of Silicon Transfer Transmitter
5. Vibration Analysis And Trajectory Control For Wafer Transfer Robot
6. Study Of End-effector Motion And Wafer Contact Status Detecting System For Wafer Transfer Robot
7. Detection Principle Of Stick-slip State On Wafer Transmission Surface And Its Sensor Design
8. Design Of Wafer Transfer Robot Controller
9. Design And Analysis Of Wafer Transfer Robot
10. Design And Analysis Of End Effector For Wafer Transfer Robot Based On Acceleration Adjustment
11. Wafer Transfer Robot Control Method Research Based On Microscopic Mechanism Of Interfacial Adhesion
12. Study And Implementation Of Trajectory Planning For R-Theta Type Wafer Transfer Robot
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