| The aim of this thesis is to study and fabricate one kind of cold cathode field emission materia with low power consumption, excellent field emission characters and steady structure. The filtered cathodic arc plasma (FCAP) technology and nano-materials self-assembly technology were combined to prepared the high-quality amorphous diamond nano-tip array. It has excellent field emission properties, the open field below the all field emission materials reported.In the first part of content, we emprasize to introduce the theories which our work is based on. Fuor parts of our work's theorety which are the filtered cathodic arc plasma (FCAP) technology,preparing and application of the anodic aluminum oxide (AAO) template,low-dimensional materials and amorphous diamond Research, were introduced and discussed detailedly..Then the structure details about 60~0 syphon equipment of FCAP designed and fabrecated by us is introduced. Several components included the discharging trigger,the arc protective shade, the filtered shield and the substrate support were designed and made by us. The equipment of FCAP made by us are of the following peculiarity: The particles of depositing films in FCAP are mainly composed of high ionized pure ions; working in successively for long time ; ideal filtered effect. General speaking, the two equipments of FCAP are of lead level comparing with other similar ones.Through combination using Anodic Aluminum Oxide(AAO) template technique and FACP technique, amorphous diamond nano-tip array formed successfully at room temperature. Microscope analysis displayed that the nano-tips have a regular shape and distribute uniformly on the film. Field emitting test shows that the lowest turn-on field of the film is only 0.04V/μm, which is much lower than1V/μm that is best result claimed in the international. We could say that our result is one of the best in the world.The influence that the deposition parameters to the quality of amorphous diamond nano-tip array is discussed in detail. The results show that the more influence on the argon pressure to the morphology of amorphous diamond nano-tip array. We believe amorphous diamond nano-tip array nucleate on the pore wall of AAO template, and grow up into wideand orderly erea when the parameters is fit to.Study the effict that the substrate bias to the content of sp~2 / sp~3 in amorphous diamond. The result by Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) analysis show that the content of SP~2 will decline with the substrate negative bias be mount up, when the bias is lower than 50V; the content of SP~2 will raise up with the substrate bias be mount up, when the bias is more lower than 50V .The amorphous diamond nano-tip array is N-doped and Cu-doped, respectively. The filed emission results show that doping will improve the field emission characters in a certain extent. The IR spectrum analysis show that N atoms are exist just like C-N,ON bond in the sample. Field emission result show that the turn-on filed reduce in a certain extent, the emission current increased prominent, the maximum current density is 98 mA/cm~2. The Raman spectrum analysis show that Cu exist like single copper in the sample, no bond with C. The turn-on field of Cu-dope array is on change, but emission current increased prominent.The main study mechods of this topic are: master the effect of parameters to amorphous diamond nano-tip array and rule of preparation. amorphous diamond nano-tip array with different morphology and different density be manufactured on AAO template. The reiterations are promised that ensure the industrialization. It will impulse the cold cathode field emission technology and vacuum microelectronics filed, while this high quanlity amorphous diamond nano-tip array sdudy successfully.
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