Study On Characterization And Characteristics Of Surface Topography By Excimer Laser

Microfriction is the key factor that effects movement of micromachine and performance hi MEMS (microelectromechanical system), because of scale effect, surface effect and quanta effect of microcomponent. There is close correlation between movement of micromachine and surface topography of micromachine. In this dissertation, experimental research and theoretical analysis on surface topography related to micromachine ubder background of MEMS is carried out. Having selected excimer laser method in high density energy beam superfine processing method and common materials for micromachine its surface microcosmic topography is constructed, characteristics of surface topography and its characterization method were obtained, the relationship between surface topography and excimer laser processing method were obtained as well.Superfine processing method and technique for excimer laser were studied. It is the first time to superfine process the micromachine component by using 248nm ultraviolet wavelength of excimer laser. Surface microcosmic topography processed by excimer laser were constructed.Experimental research on the measure (contact and non-contact) and characterization methods of microcosmic topography surface processed by excimer laser were obtained.Two dimensional graphs of surface microcosmic topography are converted to three dimensional ones by digital means. Sequentially, an intuitionistic characterization method of surface topography which has similar functions as surface topography of atom and molecule measured by AFM and FFM is obtained.On the basis of experiment, the correlativity of characteristics of surface microcosmic topography processed by excimer laser and processing technique were established. That lays the foundation for choosing technical parameters of excimer laser superfine processing, ornment of surface microcosmic topography and research of micro friction control.According to working condition of microfriction tester which can simulate actualworking condition is developed. It offers a way to study microfriction and fills in thegap between macroscopic friction tester and nanometer friction tester- SPM(scanning probe microscope).