Research On Modern Modeling Theory For Dynamic Measurement System

Dynamic Measurement plays important roles in modern metrology, and with the development of science and technology, dynamic measurement with high precision has been becoming main trends. How to describe and evaluate a dynamic measurement system well and truly, therefore becomes a research hot-point in modern science research fields. Scientists have done a lot of work to solve this problem, and have got a kind of classical theory. Traditional and classical theories have their advantages. But their shortages cannot be ignored. They take the system as "black box", and do not analyze the dynamic components contained in the system. So the models obtained often lose the important information inside the system. Furthermore, they cannot describe time-variety dynamicsystems. This dissertation presents modern methods of system description-state-space descriptionmethod and whole system whitening-description method. The two modeling methods are researched in details in the dissertation. Develop a set of dynamic measurement experiment system based on inductance displacement sensor in order to check up the correctness of the modern modeling methods. Combined the work I have done in Physikalisch-Technische Bundesanstalt Germany for one year, dynamic modeling of guides and drive systems of nanometer CMMs using state varieties analysis method has been analysed in the dissertation.The follows are the main research contents in the dissertation:Analyze the advantages and shortages of distinguishing methods of time-field and frequency-field. Much more important information in the system is often neglected when we only consider outside system. Classical method is not applicable to describe the non-linearity and multi-input and multi-output dynamic systems. Cited Euler-equation, frequency characteristics of transform equation of dispersed system has been analysed.Systemically analyze the application of modern state variety analysis method in the description of dynamic measurement system. Completely discuss selecting rules of state variety, the answer-seeking method of state variety equations, drawing method of separate component figures and signal transferring figures between components in the system. Taking traditional mechanic system and electric systems as examples, the dissertation discusses the applications of state-variety modeling method.First bring forward transform-chain equation and whole system whitening modeling analysis method. This method anatomizes the dynamic system in order to reflect signals and error transferring states between components in the system. Fully analyse the transform-chain equation of complex systems in series connection and parallel connection and blend connection. Considering the interfering noises consisted in input, output and components, the dissertation researches the composing of system's dynamic errors. This analysis method takes its advantages on the research of dynamic error tracing to the source and design of equivalent precision losing.Develop a set of dynamic measurement experiment system based on inductance displacement sensor. The experiment system employs computer and digital oscilloscope as data acquiring device. The system is the experiment basement of modern modeling theory research. Meanwhile, because the system employs free velocity changing motor as servo motor, the frequency of the motor can change freely in the scope of the maximal working value. Then the classical frequency-field system description method can be used on this experiment system.Modeling research on the dynamic measurement experiment system based on inductance displacement sensor, and obtain the parameters of the modeled model. Using resolution method gets the system's response output, then compare the results with the experiment results of the system in relatively low and high rotate velocities. The comparison results indicate that modeling method using state-variety method can meet the demands on dynamic measurement description.dynamic modeling of using state varieties analysis method has...