| More and more new materials with ecological function have been needed because of environmental problems, such as energy and natural resource will be used up in a near future, and environment is being polluted. In the field of building the glass should have energy-conserving and self-cleaning properties except for transmittance, shielding rain and wind. Up to now TiO2 is the most stable semi-conductors with photocatalytic properties, which can almost degrade all the organic pollutants into water and small inorganic molecular under the irradiation of ultraviolet. The TiO2 films coated on the glass will make the glass have photocatalytic properties, which have been thought as the most interested product in the near future, and the coated glass will have bright future. In the field of energy conservation of buildings, Window glass is weak. Coatings with the properties of reflecting infrared are coated on the glass in order to prevent the energy exchange between inside and outside of the room. The Solar control glass has low visible transmittance, but it makes room dark, low-e glass can only be used in sealed window spaces, which are filled with inert gas. The aim of the thesis is to explore the TiO2 films deposited on glass using magnetron sputtering, to make the coated glass have photocatalytic self-cleaning properties, and to deposited TiO2/TiN/TiO2 multi-films using magnetron sputtering, to make the multi-films have both self-cleaning and energy conserving properties.First, the processing conditions have been determined in order to get the better properties of the TiO2, including the sputtering gas ratio of O2 to Ar, heat-treatment temperature off line and in line. The crystalline phases and preferred orientation of the TiO2 films were investigated using X-ray diffraction (XRD),the chemical composition and ionic state on the surface of the films were characterized using X-ray photoelectron spectroscopy(XPS), the morphology and surface microstructure of the films were analyzed using scanning electron microscopy (SEM) ,Transmission electron microscopy (TEM) and atomic force microscopy (AFM), the oxygen defect of the films was researched using photoluminescence (PL) spectra, the transmittance of the films in the visible region is analyzed using ultraviolet-visible spectra(UV-Vis), photocatalytic activity of the films was evaluated by examining photocatalyticdecolorization of aqueous methyl orange, degradation of acetaldehyde and hydrophilic properties under irradiation of a high-pressure mercury lamp(125W)(UV).Second, the structure and properties of the Ce-doping and N-doping films coated on quartz glass were characterized using XRD and TEM for crystalline phases, XPS for the chemical composition and ionic state on the surface of the films, SEM for the morphology of the films, the photocatalytic activity of the films was evaluated by examining the water contact angle and photocatalytic decolorization of aqueous methyl orange.Third, under different N2 pressure,TiN films were deposited on soda-lime glass using magnetron sputtering. The TiN films were annealed at different temperature, and the crystalline phases were analyzed using XRD and TEM, the morphology of the TiN films was investigated using SEM and AFM, the chemical composition and ionic state on the surface of the TiN films were analyzed using XPS, the transmittance of the TiN films was analyzed using UV-Vis, the sheet resistance of the films was tested using four-point method.Fourth, the methods to look for materials of reflecting infrared have been researched using the basic theory of solid physics and optical films, the optical properties of the TiO2/TiN/TiO2 multi-films were simulated using computer.Fifth, the multi-films TiO2/TiN/TiO2 were deposited on soda-lime glass using sputtering, the reflectance and transmittance of the films in the region of 200nm-3300nm wavelength were analyzed using Beckman UV 5240 and Cary 500, instrument version 8.01. The composition and ionic state of the films were analyzed using XPS, the performance of the energy con...
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