Basic Researches On The Nanocrystalline Magnetci Core Film And Its Application

IT system develops toward high density, high frequency, broad band and multi-function integration. These trends require more elements integrated on smaller substrates. The Co-integration of non-semiconductor devices becomes the bottleneck of IT development. Film inductor, as the most important magnetic devices, has been intensively studied due to its large potential for application in modern information field. At the same time, the integrated film devices that based on film core materials play a key role in the development of high-speed transmission system, thus become the most attractive issues in the field of electronic information.High frequency soft-magnetic core films are quite different as compared with ordinary bulk soft-magnetic material. Large resistivity (ρ), large magnetization (Ms) and proper uniaxial planar anisotropy are need to maintain the film's high-frequency characteristic. Traditional polycrystalline magnetic materials have large Ms but small resistivity, while the ferrite materials possess large p but small Ms. Very recently, breakthrough has been achieved in Fe(Co)-based nano-crystalline alloy film and granular film. These films possess large p, large Ms and high-frequency susceptibility, thus are very suitable for magnetic core in micromagnetic devices.Based on the random anisotropy model, we introduce various nano-crystalline materials for magnetic core. Both materials are systemically investigated and a new design idea for film inductor is developed, and the properties of the films are measured. In the thesis, the basic theory, computation simulation, material preparation, device design have been explored and investigated. Following are the main contents.(1) With the systemically study on the crystallization process of amorphous alloy, a rapid recurrent thermal annealing (RRTA) technique has been developed to obtained ultra-fine grains. The crystallization kinetics model is established by using a random two-phase anisotropy film. The influences of RRTA parameters on magnetic and electric properties of soft-magnetic are studied. Theory analysis and simulation of the high-frequency impedance for soft-magnetic films are also done.(2) The isothermal and non-isothermal crystallization kinetics models of amorphous CoNbZr film are investigated for the first time. The magnetic field pulsed annealing method are used to crystallize the CoNbZr film, and the nano-size effects on...