| This thesis describes the research on the ultra-precision online measurement system. The research is based on two government projects, one is a State Key Laboratory project named ultra-precision laser profiling system, and the other is a military pre-study project named Micro-profilometer with subnanometer resolution for on-line measurement. The expected measured objects for this project are the KDP crystal and the nonspherical lenses. The research is focused on the following parts:1, Aiming at the special questions related to the application of the coaxial profilometry in noncontact on-line measurement, the author has developed a new ultra-precision laser profiling system. This ultra-precision laser profiling system is based on the Zhou's profiling system. In order to fit the requirement of on-line measurement, the optical and mechanical structure has been redesigned. And a new frequency-stabilised system was designed. This new ultra-precision laser profiling system used a PC as it main controller, and the measuring signal processing and the evaluation of ultraprecision machined surface roughness is based on the PC. It has...
|
PDF Full Text Request