The Arc Ion Plating Deposition Of TiAlN Film Aided By Pulse N Ion Beam

TiAlN coating have high hardness,high wear resistance,low friction coefficient and well combining power between membrane and matrix.Especially,there are extensive uses on characteristic of stable resistance high temperature oxidation and the field of cutting process. Now,there are TiAlN layer on the surface of cutting-tools is a mark.Presently,the technology of deposited the TiAlN layer are reaction magnetism control sputtering,radio frequency magnetism control sputtering,arc ion plating,electron beam ion plating,ion beam assistance deposits.On the kinds of deposit technology,arc ion plating became mainstream technology for the distinct characteristic on use in industry.Relative to others deposit technology,the characteristic of arc ion plating are form of fast speed,compact layer and harder combining power but the theory of arc ion plating deposit is cold negative pole discharge.It is determined that exist inevitable "large particles" on the surface of layer.These existent "large particles",not only form the soft spot of hardness but also hampered deposits of follow through atom.The result is decrease the combining power and hardness of layers,meanwhile decrease character of service on layers.So,the "large particles" serious restricted further use and develop of arc ion plating technology.In this paper,introduced pulse ion beam technology in arc ion plating.Namely,there are different stage bombard on the TiAlN layer of arc ion plating deposited by N ion beam of different energy pulse.It eliminated the "large particles" on the surface of layers and increased the hardness and combining power of layer,meanwhile,increased the character of service of layer.The different stages of bombard include:(1) in advance bombard treatment on matrix by N ion beam pulse before deposit the layer by arc ion plating;(2) N ion beam pulse assistance deposit when arc ion plating deposit;(3) after-treatment of N ion beam bombard when the arc ion plating deposit finished.In this paper,TiAlN coatings were deposited on high-speed steel W18Cr4V substrate by Russia UVN 0.5D2I ion beam assisted arc ion plating.The three different deposit stages of arc ion plating deposit TiAlN layer bombarded by N ion beam.Investigated and analyzed the N ion beam of different energy bombarded the matrix and layer by scanning electron microscope(SEM) and attach EDAX,roughness instrument,atom force microscope(AFM),X-ray diffraction analysis(XRD),ASE-430S Auger electron energy spectrum instrument,micro-hardness meter,scarification test machine,abrasion wear test machine,heat-treatment furnace of silicon carbide bar and brine stationary state erosion test and so on.Received as follows research consequence:In advance bombard treatment on matrix by N ion beam pulse before deposit the layer by arc ion plating.Intrinsic scarifications on the surface of matrix were disappeared and the surfaces were remelted by N ion beam pulse bombarded.And receive amorphous modified layer of smooth,compact and the thickness about 2-2.5μm.The composition of modified layer include the phase of(Cr,Fe),CrN,Cr₂Nå’ŒFeN when the bombard energy is 5keV;the structure of modified layer is the(Cr,Fe) phase,decreased the diffraction peak of Cr₂N and increased the diffraction peak of CrN,FeN when the bombard energy is 10keV;the diffraction peak of FeN disappeared,emerge the diffraction peak of Fe₂N,the diffraction peak of Cr₂N continue decreased and the diffraction peak of CrN continue increased when the bombard energy is 15keV.The roughness of modified layer is minimum Ra0.6 and the microhardness is maximum 1230HV_0.01.N ion beam pulse assistance deposit when arc ion plating deposit.Distinctness decrease the quantity and size of the "large particles" and received the TiAlN layer of smooth,progression and compact by N ion beam assistance bombard.When increase the energy of N ion beam bombard,the phase composition of layer is not change,only the Ti₂AlN phase gradual changed to(Ti,Al) N phase,the orientation of Ti₂AlN gradual decreased and(Ti,Al) N phase gradual increased,it was growth from low crystal plane index number(111) to high crystal plane index number(200) and(220).Widening the width of transitional layer by N ion beam bombarded when the initial stage of layer deposited. It was increased hardness and combining power of film layer because existence transitional layer.When the matrix was not introduced N ion beam beforehand bombard treatment,the hardness of film layer is 1900N HV_0.01 and the combining power of film is 35N by direct arc ion plating deposited TiAlN on matrix.And that the hardness of film layer increased to 2100 HV_0.01 and the combining power of film increased to 55N because TiAlN film layer of include transitional layer.N ion beam bombard,it changed the content of film layer component, increased the content of N element and decreased the content of Al element.When the N bombardment energy is 7.5keV,the film layer composition is Ti_0.63Al_0.37N.This moment,the hardness of film layer increased from 2100 HV_0.01 to 2530 HV_0.01 and the combining power of film increased from 55N to 80N when the energy of N ion bombardment is 0keV.The abrasive wear experimental results show that the friction coefficient decreased from original 0.3 to 0.13 and the wear resistance of film layer increased upward twice when the energy of N ion bombardment is 7.5keV.The high temperature oxidation experiments show that N ion beam bombard distinct increased high temperature oxidizing resistance of film layer and increased the resistance oxidation temperature from original 700℃to 800℃.The static brine erosion tests show that N ion bombard distinct increased the capacity of erosion resistance and the erosion resistance of film layer increased upward twice.After-treatment of N ion beam bombard when the arc ion plating deposit finished.N ion beam bombard eliminated the "large particles" on the surface of film layer.The pits changed shallow and leveling and the film layers are continuum,smooth and compact.The interface of film and matrix is change from distinct to obscure.N ion beam bombard on the interface of film and matrix made a definite thickness diffusion layer.It is the main reason that increased the combining power of film and matrix.There was no phase structure changed by N ion beam bombard,Ti₂AlN phase changed to(Ti,Al) N phase in the film layer,and while Ti₂AlN crystal orientation reduced,as well as(Ti,Al) N orientation increased,it was develop from low crystal plane index(111) to high crystal plane index(200) and(220).The abrasive wear experimental results show that the film layer was appear slight wear and the film layer was not break off when the energy of N ion bombard is 5keV.The high temperature oxidation experiments show that the surface of film layer was intact and the color of film layer was deep when the energy of N ion bombard is 5keV.The static brine erosion tests show that the surface of film layer was slight erosion and was not appear massive erosion pinhole when the energy of N ion bombard is 5keV.Bombard TiAlN coating of arc ion plating at different stage by pulse N ion beam.Distinct,decreased the quantity of "large particles" and size in coating.And change component,structure and a mode of grow,got certainly thickness "transition layer" increased the hardness and combining power of the coating.