| In order to realize the request of output torque, angular momentum, volume, weight and life-span of the attitude control components on nano-satellite (less than 10 kilogramme in weight) and picoSatellite (less than 0.1 kilogramme in weight),a kind of single stator-double rotors electromagnetic micromotor that made by bulk silicon micromachining process is mentioned.Making method of high deep-width rate, batch production of planar windings with LIGA process and silicon deep etching process is researched in the thesis. Uniformity of the photoresist film, adhesiveness between underlay and glue film, exposal and develop condition of high thickness difference are all solved in the thesis.During the course of electro form process, we got ideal electro form process condition that can get windings with uniform granule and high compactness, including current waveform, frequency, duty ratio and voltage to the windings ect. Affect of underlay's flatness to the electroform process are also analysed in detail. Compatibility between photoresist and electroforming solution is also solved.Through the analysis of windings, rotate course of the micromotor and the analysis of induced electromotive force, induced current, average output torque, limit speed ect during the course of the rotating condition, computing equation of rotate speed, output torque ect are given.Noncontact microtorque measurement equipment is used to measure the output torque of the electromagnetic planar micromotor. Data communication between computer and electro balance are realized through VC++ serial interface program, high frequency acquire are also realized through windows high precise timer. There we solved the problem of measuring the arm of force through indirect method of measurement. Precision of the equipment is studied and error equation is offered. It is verified that the output torque can reach 300μN. m and the relationship between output torque and rotate speed approximately linear.
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