Analytical And Experimental Study On Characteristics Of Thermal Actuated Micropump

As a hot point in MEMS, microfuildics shows great market potential in the areas of medicine, chemical analysis, environmental detection and biological engineering, etc. In this thesis, performances of main parts of thermal actuated micropump and micropump itself are theoretically and numerically analyzed and experimentally tested.Temperature distribution and oscillation of the driving membrane of thermal actuated micropump are numerically analyzed at many cases with the driving frequency and input power as parameter. Based on the temperature distribution analysis and dimension effect of forces, Analysis indicates that thermal actuated pump is efficient only at small scale. Optimization of construction of the membrane shows that circular aluminum membrane is more advisable than annular one. The stroke volume of the chamber is enlarged when the thickness of aluminum membrane is increased or that of silicon membrane is decreased. Placing the polysilicon at the center is better than placing it at edge.The priming pressure, static and dynamic characteristics of cantilever microvalve are analyzed to obtain the relationship between geometrical size, static pressure difference and flow rate. Resonance frequency of the microvalve is much higher than the working frequency of the thermal actuated micropump. So the dynamic characteristics of cantilever microvalve can be neglected.Based on the analysis of three main parts (membrane, microvalve and channel) of thermal actuated micropump, the micropump is simulated as whole. Simulation results of flow rate versus driving frequency, pressure head and input power are obtained. It is found from simulation that , when the input power is 1W, the micropump has maximum flow rate at 3.3Hz and the pressure head can raise to 64 kPa when the flow rate is zero. When the input power is low, the flow...