The Study On The Double-gain Hadamard Spectrometer's Technology Based On MEMS

Miniaturization and integration are now leading an important way for spectrum instruments development. However it brings a series of problems. For example how to get high sensitivity, at the same time get high thoughput when measuring. On the basis of theoretical analysis, the construction and principles of dispersive spectrometer and hadamard spectrometer is analyzed.According to the issues above the key technologies of mini spectrometer is proposed in this paper.And the type and coding of the input slit of the spectrometer have been analyzed. Multi-micro-silicon-slitsmatrices is produced by MEMS technique. Each elment is only 6μm×6μm. We choose the symmetrical optical path system and use optical design software to simulate the actual situation of the optical path, and optimize the system to eliminate coma aberration. The pre and post silicon slits which have such features as small volume and high precision by MEMS technology up to the requirements are designed which brings theoretical support for miniaturization.Because the limitation of the software,multi-micro-silicon-slits can't use it. A new method to evaluate the throuput of the spectrometer was proposed,so we can know what the CCD received. The new parameter we call it"The whole spectrometer parameter", that is based on the whole spectrometer. And it proved to have a good way to designing the spectrometer. The actual diffract situation of input slit of Hadamard spectrometer on throughput after all the optical element. The constant of the spectrom is described precisely on the detecting plane.The way of analysis can provide some theoretic and applying foundations for slit design. Based on diffract theory, the formula is presented. The phenomenon of diffraction is analysed by using the software of Matlab. The experiment verified that the programmer using the Matlab programming language is reasonable. The performance of traditional silt and Hadamard slitis compared. Feature of the presented device with Hadamard slit is the throughput advantage (up to the factor of 3.10).In order to realize high throughput of Hadamard spectrometer, the performance of four Hadamard S slits are compared. Based on diffract theory, the formula with Hadamard S matrix is presented. The compare between the Matlab simulating picture and the actual diffract picture of S slits on throughput. The influence of the factors such as the spot distance,slit dimension and the matrix array on the throughput is analyzed, then the diffracting way of S slit was offered. The set of experiments run with the system compare the performance of Hadamard S (N=15) and Hadamard cyclic-S (N=15). Feature of the presented device with Hadamard S (N=15) is the throughput advantage (up to the factor of 1.45).In order to realize spectral analysis of weak signal, a Hadamard spectrometer of high throughput ,high resolution and stable is established.