Optimechanical Analysis And Optimization Of Precision Lens

With the development of integrated circuits, semiconductor components,optoelectronic devices, and miniaturized optical devices, the needs of optical lens withhigh precision surface profiles increases accordingly. For example, the accuracy ofsurface profiles of a193nm lithography projected lens is required to achieve about1~2nm RMS or even higher. Compared with the conventional optical system, theliquid lens has a huge advantage for system miniaturization. People prefer a liquidlens which has balanced properties among image quality, high reliability, andmanufacturability.In order to fulfill the requirements of precision optical system, we researchoptimechanical properties of single lens with high precision in this thesis. In order toobtain good testing precision with reasonable reproducibility, we analyze and designkinematical support structure for a lens testing using the contact finite elementanalysis. A reasonable clamp structure and the corresponding load have been proposed.This provides guidance and reference for the kinematical support structure of precisesingle-lens. For the method of rotating average absolutely measurement, we analyzethe influence of the measurement results according to the rotating the testing supportstructure. Especially, the variance of testing results with regard to the rotational errorand eccentricity error are analyzed systematically. This work provides a theoreticalbase for guarantee the measurement accuracy of the above mentioned measurementmethod. In order to improve testing efficiency, we propose a method to obtain high-precision lens surface profile based on merely single test result and the computedsuface deformation of lens using the finite element method. The feasibility of theproposed method has been verified via the comparison between the method of rotatingaverage absolutely measurement and the proposed method.In order to improve the optical performance of precision lens, the structuraltopology optimization method is used to design the optimal topology of lens andcorresponding frame structures. The detailed shape and size of lens and framestructures are further optimized using the parametric optimization method. The mainresearch aspects include the optimization of liquid lens with geometrically largedeformation according to the surface profile of lens, optimization of lens supportstructure with contact surface, and the optimechanical structure topology optimizationof deformable mirror. The results in this thesis have important theoretical andengineering contributions to the optimechanical design of precision lens in thepractical project.