A Non-contact Measurement Method For Mechanical Information Based On The Flexible Nanometer Wrinkle

Recently, flexible sensor technologies, such as flexible electronics, bionic skin, wearable electronics, and so on, have become a more and more popular topic. Different from the traditional system, flexible system was with the soft form and work in the way of bending, stretching, folding, and twisting. Based on the flexible sensing elements, it can sense the mechanical information of which have challenged viewers' perceptions of form and functions.The two main technologies have been reported to sense the mechanical information in the flexible systems. One was to transfer the mechanical signal to the electric signals based on the piezoresistive effect, and the other was to transfer the mechanical signal to the spectrum signals based on the diffraction effects. Then, the signals have been processed by the test circuits technology which resulting in the wire, the port and the function elements breaking in the flexible systems.This work presents a non-contact measurement method to sense the mechanical information in the flexible systems. The works was focus on the methods to manufacture the flexible metal conductive wire based on the nano-wrinkle, to read the signals using the noncontact technology, to modify the adhesion between the metal and the elements and to sense the vector information.(1) The processing technology for the flexible metal conductive wire based on the nanowrinkle structure and the double-side orthogonal polydimethylsiloxane wrinkles. The conductive wire with a size of 50 ?m were formed by vacuum deposition on top of pre-strained and relaxed polydimethylsiloxane(PDMS) substrates, which have been treated using an O2 plasma and a surface chemical functionalization process. This conductive wire can reach a strain limit up to 200% with the error of 4%. After stretching 400 times, the resistance veriable was less than the 1.1?. Based on this structure, the anisotropy and isotropy conductive wire have been developed for more application fields.(2) A non-contact measurement structure and method to sense the mechanical information in the flexible systems. A flexible LC oscillation circuit have been designed to detect the signals in the flexible system. The carbon nanotube(CNT)/polymer structure have been used to sense the mechanical information as the capacitance structure. The flexible inductance structure have been fabricated based on the flexible metal nano-wrinkle structure to read the signals with the error of 5% under the strain of 100%, and the temperature coefficient was 0.003?-1, the relative humidity coefficient was 0.00075RH%-1. Based on this capacitance and inductance structure, the non-contact sensor structure have been designed. Finally the finger movements have been demonstrated using this non-contact sensor structure.(3) A method calculating the vectorial information and achieved application. Based on diffraction effects of the single flexible orthogonal polydimethylsiloxane wrinkles, the signals working on this structure can be detected by calculating the displacement and intensity of diffraction spot. Using this method, the vectorical information have been quantitative calculated with the errors of 0.6% for the stress/strain and 0.4% for the displacement.The methods in this work have solved the breaking problems of conductive wire, port, and adherent based on the non-contact technology, and develop the processing technology. It is the potential methods to improve the portability and integration for the flexible sensors and systems, and service as the foundation and approach.