Fabrication Of Micro-nanostructures Based On Super-aligned Carbon Nanotube Films

The uniform preparation of super-aligned carbon nanotubes(SACNT)provides solid foundation for application research.In this thesis,the morphology of SACNT were transferred to metal,semiconductor and oxide.Thus the excellent nanostructures of SACNT was no longer confined to carbon materials.Carbon nanotubes shared regular distributions in SACNT film with direction and period.With the fabrication method of reactive ion etching,the nanostructures of SACNT was transferred to metal materials with thickness of nanometers uniformly.The as fabricated metal meshes with feature size of nanometers exhibited good properties as transparent conductive layer,as the fabrication methods could be implemented in common used metal,such as gold,copper and aluminum.The SACNT films played significant role as etching mask in the etching process,which was proved in the in-situ test.With the advantage of SACNT films preparation in suspended manner,its morphology could be modified by laser treatment.As a result,metal meshes with designed period could be realized under the mask of laser processed SACNT films.It is an efficient method to make adjustment between optical transmission and resistance of metal meshes as transparent conductive layer.Furthermore,the morphology of SACNT films was transferred to the surface of GaAs materials as a surface modification method.As the condition of total reflection was changed,the luminescence efficiency of materials was promoted by the morphology modification.On the other hand,SACNT films could also act as framework in the fabrication of metal nanoparticles.As fabricated metal nanoparticles shared a distribution along the carbon nanotubes and had significant effect in luminescence efficiency promotion in GaN materials.As the SACNT films realized fabrication in commercial scale uniformly,it is believed that as fabricated super-aligned metal or semiconductor nanowires share extensive application prospect and theory value.