The Manipulation Of Light And Optical Nanometrology With Micro-nano Structures

With the development of laser technology and the progress of micro-nano photonics,the effective control of light field at the micro-nano scale has attracted widespread attention.The effective regulation and control of photons with nanostructure such as Surface Plasmon Polaritons,(SPPs),Bloch Surface Waves,(BSWs)and metasurface allows people to obtain a variety of new structured light fields.The space distribution of amplitude,polarization and phase enables many novel characteristics to be produced when light interacts with matter,which has an important application value in the fields of optical integration,photonic chips,and high-precision nano measurement.Based on this,the thesis carried out the theory and experiment of the generation,modulation of structured light field and high-precision displacement measurement.This dissertation presents the research works and conclusions,as following:1.Cooperative invention of a spatial light field generation method and device based on the Michelson interferometer.The device has a relatively high degree of integration,and can simultaneously achieve polarization and phase modulation and output in multiple channels.This device has extremely high degrees of freedom in light field modulation by means of switching basis vector easily and insertion of functional components,and can realize interference-free detection of light field.2.Generation of bloch surface wave Airy beam on one-dimensional photonic crystal by coupling the free-space Airy beam with surface grating..The surface Airy wave can maintain the properties of free space Airy beam,which realize the dynamic manipulation of the surface light field by the micro-nano structure,with the advantage of low loss.Fluorescence polarization switch was designed by composite surface plasmon and Tamm plasmon,and the optimized parameters were obtained through simulation calculation.Then the circularly polarized chiral modulated fluorescent vertical exit was obtained,which can achieve a contrast of 6.5dB.3.We proposed the modulation effect of the residual light field on the generated light field by metasurface,Analyzed and simulated the light field form generated by non-ideal hypersurface.Then we design a silicon metasurface that works in visible light range based on the Finite Difference Time Domain(FDTD)method.We experimentally verified the modulation characteristics of the residual light field on the metasurface generated light field with a cylinder vector light meta-generator,which provides new degrees of freedom for the manipulation of the light field.4.Based on the double slit antennas structure on the metal film,a double-magnetic-dipoles model is established.This model realizes asymmetric excitation of SPPs through coupling of SPPs during excitation of non-uniform light field.Then asymmetric excitation process of position-sensitive SPPs between the structured light field and the dual-slot antenna.We experimentally realized ultra-precision displacement measurement with a lateral resolution of 3.3nm displacement and a 3.1 A displacement sensitivity by focusing on high-order Hermite Gaussian light fields and Fourier surface leak imaging.Highlights in this dissertation are as following:1.A free-space Airy beam is generated using a spatial light modulator,and a low-loss Bloch surface wave Airy beam was generated and dynamic adjusted through a grating structure on the surface of a one-dimensional photonic crystal,which provides a simple and reliable method to dynamic control the surface light field by micro-nano structures.2.We analyzed and experimentally verified the modulation effect of the residual light field in the system on the metasurface generated field..A silicon cylinder vector light meta-generator works in the visible light range was designed and fabricated.This word provides a new idea and degrees of freedom about metasurface design and optical field modulation.3.We propose the dual magnetic dipoles model of the slit antennas on metal film and analyze its asymmetric excitation characteristics of SPPs under illumination of non-uniform light field.Displacement resolution down to order of nanometer is achieved by SPPs' fourier surface leak imaging technology in the experiment,which provides us new idea and method in optical calibration and non-contact displacement measurement.