Research On Solid-state Terahertz Mixing Technology

THz Wave refers to electromagnetic wave with a frequency range of 0.1 THz to 10 THz.On the one hand,terahertz waves can realize higher system resolution,larger information capacity and smaller system volume.Thus,terahertz can be applied to radar,communication and other fields.On the other hand,terahertz waves are more penetrating and can be applied to rain and fog weather and other extreme environments.At the same time,terahertz waves have lower photon energy and can be used in biomedical,human security and other fields.Terahertz and terahertz technology have broad application space in the fields of radio astronomy,radar imaging,communication,meteorological monitoring,human security,and biomedical.Solid-state terahertz mixers are the core components of terahertz systems,and their performance directly determines the performance of the entire terahertz system.This dissertation focuses on terahertz solid-state mixing technology,including extraction method of the high-frequency parasitic parameters of the Schottky diode,hybrid integrated terahertz mixer technology and monolithic integrated terahertz mixing technology.The main research contents of the disertation are as follows:1.Study on non-biased terahertz mixing technology.Firstly,this dissertation makes deep studies on hybrid integrated non-biased terahertz mixing technology.A novel mixing circuit structure is proposed to effectively reduce the random error of the silver epoxy in assembling.The circuit structure is applied to the 183 GHz sub-harmonic mixer.Secondly,two 200 GHz sub-harmonic mixers are successfully developed based on the radial probe.Thirdly,the hybrid integrated fourth harmonic mixing technology is studied in depth,and a 0.67 THz fourth harmonic mixer is developed.2.Study on biased terahertz mixing technology.In the high frequency band of terahertz,sufficient local oscillator power is difficult to obtain.In this dissertation,the terahertz biased mixing technique in hybrid integrated mode is studied.A novel terahertz biased mixer design method is proposed,and a 0.67 THz biased sub-harmonic mixture is designed3.Study on extraction method of high frequency parasitic parameters of Schottky diode.The package size of the Schottky diode in the terahertz band is comparable to the signal wavelength,so an accurate three-dimensional electromagnetic model is required for the Schottky diode and high frequency parasitic extraction is performed.In this dissertation,a high-frequency parasitic extraction method for anti-parallel Schottky diodes is proposed,which can accurately and effectively extract parasitic parameters such as parasitic capacitance,parasitic inductance,and high-frequency parasitic resistance of the diode.It provides a guidance for the design of hybrid integrated solid-state terahertz mixing,laying the foundation for monolithic integrated terahertz mixer diodes and overall circuit design.4.Research on monolithic integrated terahertz harmonic mixing technology.In the terahertz high-frequency band,the mixer using hybrid integration method is limited by factors such as the size of the discrete Schottky diode,the thickness of the quartz circuit processing,and the accuracy of the cavity processing.Based on the existing domestic gallium arsenide process,the 860 GHz sub-harmonic mixer is designed and processed for the first time in China,which promotes the localization process of the terahertz high-frequency mixer.