Research On On-Chip Integrated Optical Device Based On Methylaminohalide Perovskite

The on-chip integration technology of functional devices is the basis of the vigorous development of the semiconductor industry.After decades of development,on-chip integration has become the top priority of semiconductor device research.Among them,optical devices are an important part of the research field of semiconductors.Optical devices not only need to be integrated on-chip,but also continue to move toward the diversification of sub-wavelength sizes and material systems.With the continuous breakthrough of Moore's Law through the development of silicon-based material systems through nano-preparation technology,the research of other material systems has also supplemented or even created new directions for on-chip semiconductor devices.Only nearly a decade ago,methylamino lead halide perovskite gradually entered the field of vision of researchers from the field of photovoltaics.Perovskite materials exhibit very stable optical properties of spontaneous radiation amplification and laser emission and adjustable band gap,and quantum efficiency can even be close to 100%.All kinds of excellent properties will bring industrial innovation in the field of optoelectronic devices.In the current research,in-depth exploration of material properties is also directly preparing perovskite materials into optical devices in the mature semiconductor device architecture.However,the problem is that the industry has not yet developed a preparation process for halide perovskite.In most cases,the naturally synthesized perovskite microplates and nanowires usually have random sizes and cannot be controlled in shape.On-chip integrated device with adjustable laser mode.The application of richer on-chip devices for perovskite semiconductors has been hindered.In this paper,starting from the research point of solving the important problems faced in the on-chip integration of halide perovskite,the laser source with a configurable laser cavity and repeatable laser properties is realized for the first time.Created a perovskite vortex on-chip laser with an orbital angular momentum varying from-4 to +4.The halide perovskite is integrated directly on the optical waveguide,and real-time detection of particles with a radius of about 70 nm is achieved.A series of studies on integrated optical devices on perovskite sheets have greatly promoted the application of perovskite lasers in on-chip optical interconnection,biosensing and quantum optics,and expanded the practical application of optical devices of perovskite materials.This paper mainly completed the following work:(1)Starting from the nature of methylamino lead halide perovskite materials,on the basis of micro-nano preparation technology,the on-chip integration capability of methyl amino halide lead perovskite single crystal was explored.The laser properties of many groups of perovskite single crystals grown by solution method were analyzed in detail,and their respective laser modes were verified by numerical simulation calculations.The repeatability of the application of perovskite single crystal on-chip integrated light source is verified,and the direction of solving the problem is proposed.A liquid crystal encapsulated perovskite single crystal is used to realize a laser output temperature controlled perovskite laser.(2)A top-down improved preparation for perovskite single crystal was developed,and a perovskite disc cavity and patterned device were successfully prepared.The main research contents include mask patterning of perovskite microplates by electron beam lithography and etching by inductively coupled plasma to obtain high-quality disc-shaped perovskite single crystal cavity.The disc perovskite single crystal can produce a high quality factor laser exit,the laser quality factor is one order of magnitude higher than the naturally growing single crystal.At the same time,through the analysis of the device mode interval and laser wavelength,it is found that this laser has controllability and repeatabilit y.It also realizes the unique unidirectional laser emission characteristics by manufacturing the deformed disc cavity,which solves the important problem in the development of perovskite semiconductor devices.(3)The methylamino halide perovskite can be used as an on-chip laser light source in optical devices.However,existing perovskite lasers are generally linearly polarized,that is,they only have a uniform wavefront and lack structured lasers carrying orbital angular momentum,which is contrary to the high-capacity requirements of next-generation optical communications.We prepared the ring grating structure of the perovskite film by optimizing the preparation process,and obtained the perovskite vertical surface emitting laser(VCSEL).Further chang ing the structure to an Archimedes spiral grating with different number of arms,the wavefront of the on-chip perovskite laser becomes helical,giving the perovskite laser a topological charge number of-4 to +4.The study of perovskite vortex on-chip lasers with high directivity exit and controllable topological charge will greatly explore the application potential of perovskite on-chip lasers in optical networks,biosensing and quantum optics.(4)By integrating the halide perovskite nanosheets into the silicon nitride Si3N4 waveguide,an on-chip photodetector for perovskite waveguide light is realized.It can even be used as an optical sensor and can detect nano-scale objects even in polar solutions.The performance parameters of this integrated waveguide perovskite photodetector can be as good as the detector that collects surface space light,and it also has the ability to detect small changes in the optical signal in the waveguide.Nanoscale objects with a radius of 70-80 nm can be detected by the real-time change of photocurrent.More importantly,thanks to the integration of on-chip detectors,the entire sensing system uses only conventional semiconductor laser light sources and standard fiber coupling The system,device applicability and portability h ave been significantly improved.The on-chip integrated perovskite optical sensor under study can play an important role in future point of care(POC),biochips and wearable devices.In summary,this paper uses methylamino lead halide perovskite as the mat erial system,and uses micro-nano fabrication technology as the basis and targeted improvements to achieve device innovation from laser light sources on perovskite semiconductor chips to on-chip photodetectors.Developed a top-down device fabrication technology for perovskite single crystals,which solved the important difficulties in the development of perovskite semiconductor devices,and on this basis,further introduced vortex lasers carrying phase information into the perovskite on-chip system.Successful detection of polystyrene particles with a radius of about 70 nm using perovskite materials.The research work of this paper further promotes the development of on-chip optical interconnection,biosensing and quantum optics.