Fabrication And Application Of Micro Electro Mechanical Systems

Recent years have witnessed the booming development of microelectromechanical systems(MEMS),combining precision machinery with microelectronics,in both engineering applications and fundamental research,represented by micro sensors and quantum devices respectively.The nanomechanical resonators,as a typical MEMS with micro scale,low-power dissipation,high sensitivity,and scalability,have been extensively employed in the field of precision measurements,phononic crystals,topological physics,and quantum computations.However,when it comes to adiabatic dynamics and non-equilibrium physics,where individually tunable couplings are desired,the traditional strain-based coupling strategy becomes powerless.Here,the artificial lattice,possessing both programmability and scalability,is realized by employing electrostatic parametric couplings instead of strain couplings.The entire work is presented with the beginning of silicon-based string resonators,and follow up with the promotion of nonlinearity,Q-factor,and coupling strength.Meanwhile,the microfliud system is introduced into nanomechanical system by micro jet.Finally,we exhibit the realization of programmable nanomechanical lattice and explore the topological physics.The specific contents are as follows:1.In terms of nanodevice,we manage to realize the programmable nanomechanical lattice,consisting of 13 closely adjacent string resonators.Under the environment of 77 K and 10-6 Pa,the Q-factor can reach 2×105.Moreover,this device enable linearly controllable strong coupling for both nearest-neighboring and next-nearest-neighboring resonators,which provide a promising platform for engineering mechanical sensors and exploring fundamental physics;2.In terms of engineering application,we manage to realize the coupling of high Q-factor string resonators and microfliud system.By means of stochastic resonance,the power density of microfliud system can be detected at micro-scale,attached with the energy exchange between microfliud and nanomechanical systems.This coupled system blaze a path toward nanogenerator;3.In terms of fundamental physics,we manage to realize the topological Su-Schrieffer-Heeger model.On the same reconfigurable nanomechanical lattice,different topological interface states are delivered,where energy localization occurs.Meanwhile,the dynamics of the generation and the extinction of topological soliton states are observed in time domain.This dynamic observation permits us real potential in exploring complex dynamic procedures and constructing novel topological structures.In summary,we demonstrate a sensitive,programmable,and scalable nanome-chanical system with promising potential in time-dependent manipulation and high-dimensional construction,which is invaluable in investigating novel topological physics and metamaterial.