| The rapid growth in micro/nanotechnology has opened a great opportunity for polymer thin films and polymer nanocomposites. Thermal management or thermal effects in those applications need to be carefully examined. For example, the local heating in electron-beam lithography, emersion lithography, and scanning near field optical lithography may cause the degradation of photoresists and reduce the resolution. The development of many organic electronics, polymer micro-electro-mechanical-systems (MEMS) devices, and polymer nanocomposites may require the knowledge of heat transport in micro/nano-sized polymers. Thermolithography, a novel lithography, uses controlled localized heating to transfer patterns and requires the thermal conductivity data to control. It is of considerable scientific and technological interests for study heat transport in polymer thin films.; Unlike bulk polymers that can be measured using commercially available instruments, polymer thin films are difficult to measure. In this manuscript, we develop the measurement techniques suitable for measuring thermal conductivity of polymer thin films and polymer nanocomposites. Using a microfabricated membrane-based device, we study the heat conduction in photoresists at difference process stages. This data is used in our thermolithography study, where we use microheater to study the kinetic of crosslinking reaction of photoresist. The feasibility of thermolithography and potential three dimensional micro/nano-fabrication is presented. The uniqueness of thermolithography is also demonstrated by patterning amorphous fluoropolymers.; A modified hot-wire technique is used to measure the thermal conductivity of graphite nanoplatelet (GNP) reinforced nanocomposites, one of the promising candidates for multifunctional materials. Thermal interface resistance in GNP nanocomposites is investigated, which shows a strong effect on energy transport in the nanocomposites and can be diminished through surface treatment. |
