| Low Temperature Co-fired Ceramic (LTCC) and Kapton polyimide materials have been successfully used to fabricate magnetically actuated Mesoscale Electro Mechanical Systems devices. LTCC and Kapton are electronic packaging materials that have been traditionally used for microelectronics applications. General design rules were developed which allow designers to efficiently plan and execute their designs. Magnetic actuation in LTCC and Kapton system was demonstrated successfully with a permanent magnet cantilever beam actuator. A permanent magnet attached to a Kapton beam was deflected with the magnetic field produced by electromagnetic coils fabricated on LTCC. A permalloy beam was also actuated using the same coils on LTCC. Magnetically actuated diaphragm pump was successfully fabricated, tested, and analyzed. Three pump designs were considered. The first design consisted of a square pump chamber, a single Kapton diaphragm and a rectangular magnet. The second design consisted of a circular chamber, a single Kapton diaphragm and circular magnets. The third design consisted of a circular chamber, two Kapton diaphragms, and circular magnets. Electromagnetic coils were photolithographically patterned on the Kapton diaphragms. Magnets provided external magnetic fields to the coils. Prestretching the diaphragms improved the performance of the pumps during operation. The prestretching reduced the diaphragm's thermal deformation resulting from Joule heating. Linear static analysis was performed to simulate and optimize the magnetically actuated diaphragm. Nonlinear static analysis was performed to simulate the nonlinear response and the Joule heating effect. |
