| Piezoresistive materials have long been used in the sensor industry. The changing resistance due to changing strains allows piezoresistive materials to be used as inertial sensors, e.g. pressure transducers and accelerometers. These are the largest sensor applications covering over 50 percent of the market.; The material properties of diamond make it an attractive sensor material candidate. Diamond is a strong material with an elastic modulus in excess of 350 GPa. It is known as the most thermally conductive material, 22W-cm/K, as well as being piezoresistive and chemically inert in excess of 600°C. Additionally, diamond films are semiconducting. Undoped diamond films offer excellent electrical insulation while boron doped diamond exhibits p-type semiconducting properties. All of these properties provide a material with a large potential for sensor development, where strength, ruggedness, and electrical properties are the key elements for sensor performance.; Diamond is developed as a sensor material by taking advantage of its strength and semiconducting properties. Gauge factors for diamond piezoresistors are measured in excess of 1000 and in excess of 300°C. |
