Switch-off is a serious on-state reliability concern for metal-to-metal antifuses. This dissertation deals with switch-off in two approaches: either to avoid it or to eliminate it. To avoid switch-off, certain constraints have to be put on the operating current. To eliminate switch-off, it is suggested that the radius of the conductive link should be much larger than the antifuse layer thickness. Both of these approaches are based on an electro-thermal model.;This electro-thermal model has been developed to predict the temperature field in an antifuse. During programming, as the temperature at their interface exceeds their reaction temperature, reaction between the antifuse and electrode materials occurs, typically in the form of silicidation. A conductive link is formed within the temperature contour of the reaction temperature. Thus the radius of the conductive link can be calculated. Accordingly, the temperature rise at the conductive link during current stressing is known.;Knowing the temperature at the conductive link, one can easily incorporate the electromigration lifetime model to formulate a lifetime model for the programmed ;On the other hand, the Wiedemann-Franz Law can be applied to the electro-thermal model and results in two important conclusions: the on-state resistance of metal-to-metal antifuses is not a strong function of the conductivity of the electrode; the radius of the conductive link is inversely proportional to the thermal conductivity of the electrode. Accordingly, low-... |