Aerosol size effects in combustion chemical vapor deposition

ombustion chemical vapor deposition (Combustion CVD) is a coating deposition process that relies on aerosol technology to provide transport of film precursors to the deposition environment. Film precursors are dissolved in a flammable solvent. The resulting solution is atomized to form an aerosol with a distribution of droplet sizes. This aerosol is ignited to produce a flame which provides the heat necessary for chemical reactions and vapor deposition to occur on a substrate held in or near the flame.;Coatings were deposited using three aerosol size distributions (Sauter mean diameters of 1.9, 4.0 and 6.8 ;Large aerosol droplets and high precursor concentrations caused the appearance of polycrystalline particle clusters (clusters) on the substrate. A critical amount of precursor in a droplet,...