4H and 6H silicon carbides, indium phosphide and dilithium tetraborate as candidates for a bulk-acoustic-wave (BAW) mass microbalance

Sensitivity of the bulk acoustic wave mass microbalances was determined by using polybutadiene in toluene (0.01 M solution). The measured maximum corrected extrapolated (slope of line) sensitivities for the microbalances were ;The parameters, such as spectrum, stability of circuit, output power, mode stability, electromechanical coupling factor, phase velocities or frequency constants, and electrical constants of the bulk acoustic wave resonator were studied for all of the piezoelectric materials above.