| A multi-ion-beam sputtering (MIBS) system, capable of simultaneously sputtering three targets to produce multi-component thin films, was assembled. Composition monitoring of depositing thin films was achieved with a computer-interfaced quartz crystal microbalance (QCM), which measures the areal density deposition rate. Ferroelectric lead-lanthanum-titanate (PLT) thin films were deposited with the MIBS system by using a reactive sputtering process (MIBERS) followed by post-deposition annealing.; The procedure for depositing PLT thin films was established through a detailed investigation of the reactive sputtering of Pb, La, and Ti metal targets in an oxygen atmosphere. Analysis of the sputtering process included measurements of the sputtering rate, deposition spatial distribution, and secondary ion emission from each of the metal targets under various sputtering conditions. By thoroughly understanding the reactive sputtering process, and by developing of computer software that provided real-time QCM deposition rate measurements, it was possible to establish a deposition procedure for depositing PLT thin films with systematic composition changes.; In annealed PLT thin films, anion stoichiometry affects phase formation while cation stoichiometry controls the microstructure development. Both the perovskite and the pyrochlore phase can be produced, depending on the oxidation of lead in the deposited thin film; the qualitative relationship between oxidation, annealing time, annealing temperature, and heating rate is established. Perovskite films containing nearly stoichiometric cation compositions consisted of approximately 10 nm nanocrystals that exhibited {dollar}langle 100rangle{dollar} texture. The PbO stoichiometry controls the volumetric size of {dollar}langle 100rangle{dollar} textured regions, and excess PbO introduces significant porosity due to PbO evaporation. A model relating nanocrystal texture to PbO stoichiometry is presented.; Composition-induced changes in the PLT thin film electrical properties are explained by applying a mixing rule model to the microstructure model that relates composition and nanocrystal texture. Space charge limited conduction and electron trapping are combined with the mixing rule model to explain the electrical properties measured under high electric field conditions. The feasibility of using PLT thin films in non-volatile memory devices is demonstrated through polarization switching measurements which simulate device performance. |
