One-Dimensional Nanowire Gas Sensor Fabricated By Nanomolding In Capillary

Nanostructure-based microsensors have attracted great interest in the development of new sensors due to their very high aspect ratio and extremely low power consumption.However,most of the current fabrication approaches of nanostructures heavily rely on expensive equipment and complex processes,which greatly limits the practical application of devices based on nanostructures.In recent years,the evolving printing technology has been widely used in the manufacture of microelectronic components and chips,which has the advantages of low manufacturing cost and reproducible manufacturing over a large area.However,due to the process limitations,it is difficult to achieve stable manufacturing of submicron and nanostructures by conventional printing techniques.In order to solve the above problems,this paper starts from the basic structure of the device and adopts a nanomolding in capillary based nano printing technology.After the parameters optimization,one-dimensional ordered nanowire arrays based on conductive macromolecule were successfully fabricated on rigid and flexible substrates,respectively.The line width is less than 100nm and the print area is as large as 1 cm?1 cm.Based on the successful preparation of the nanowire structures,the nanowires were integrated into the sensitive unit of a resistive microsensor or sensor array to detect NH₃,NO₂,and volatile organic compounds.The main research contents and results include:1.A nanomolding in capillary enabled nano printing technology was developed in this paper.By optimizing the process parameters and steps,it successfully realized the fabrication of one-dimensional ordered conductive macromolecule nanowire arrays on rigid substrates and flexible substrates,which proved that this technique provides a versatile nanofabrication approach with high material and substrate compatibility.2.A nanowire-based rigid microsensor was successfully fabricated on the basis of completing the preparation of nanowire array.The gas sensing properties and sensing mechanism was studied through the detection of NO₂ and NH₃.The advantages of nanowire structures in gas detection were verified through the comparison between nanowire sensor and thin film sensor.3.In order to effectively detect and distinguish different kinds of volatile organic compounds,the graphene oxide-doped conductive polymer was used as gas-sensitive material to fabricate nanowire-based electronic nose through the nanomolding in capillary technique.The mechanism of volatile organic compounds detection was analyzed.Combined with statistical algorithms,the reliability of this e-nose system in VOCs discrimination was verified.4.In view of the need of flexible electronics in the field of gas detection,a flexible micro gas sensor based on PEDOT:PSS nanowires was fabricated through nanomolding in capillary.The mechanical properties and gas detection performance of the flexible sensor were studied.Through the design of printed circuit board with impedance detection function and APP that can display the impedance in real-time,the manufacture of nanowire-based smartphone enabled wearable gas detection system was realized under the condition of integrating the flexible micro gas sensor,and the application potential of this system in real-time monitoring of toxic gas and food spoilage was verified by the experiments.