Study Of Mie Resonance And Application In Nanostructure Based On Dielectric Materials

Nanostructures based on metal materials,due to their unique Surface Plasmon Resonance(SPR)characteristics,can realize the adjustment of electromagnetic wave amplitude,phase,polarization and other characteristics,which has become an important research direction in recent years.However,due to the non-negligible heat loss of metal materials such as gold and silver,and the preparation process may not be compatible with the mature CMOS process,its application in micro-nano photonics is limited.So far,only a few metamaterials based on localized surface plasmons can be realized in practical applications.Recent studies have found that high refractive index dielectric nanoparticles can also generate strong optical resonances,including both electrical and magnetic resonances,while metal nanoparticles can only generate electrical resonances.At the same time,compared with metal materials,the loss of dielectric materials is very small and almost negligible.Micro-nano devices based on dielectric materials can solve the problems of which based on metal materials,so that it can provide a new way for the realization of high-performance,miniaturized and highly integrated photonic devices.In this paper,micro-nano structure based on high-permittivity dielectric materials is used to generate resonance,to replace the widely used micro-nano structure based on metal materials.We study the principle of optical response generated in different micronano structures based on dielectric materials and their corresponding filtering and sensing properties.The main research work is summarized as follows:(1)We have summarized the types of resonance generated in the micro-nano structure based on dielectric materials and their corresponding resonance principles,and introduced in detail the methods that are often used to improve the characteristic parameters of resonance in the design of micro-nano structures based on dielectric materials: Bound states in continuum theory and Fano resonance theory.According to these two theories,a method for designing and optimizing a micro-nano structure based on dielectric materials that can achieve the expected resonance characteristics is summarized.(2)In this paper,a theoretical model of the hexagonal micro-nano structure based on dielectric materials is established,and the finite difference time domain(FDTD)method is used to numerically analyze the type and characteristics of resonance.By adjusting the size of geometric parameters such as period ratio,we realized that the bound state in the continuous(BIC)was continuously adjustable from 8 ?m to 12 ?m in the long wavelength infrared band.At the same time,we studied the influence of the angle of incident light on the resonance characteristics.(3)Using the resonance characteristics of the hexagonal micro-nano structure based on dielectric materials,that is,the BIC is continuously adjustable from 8 ?m to 12 ?m in the long-wave infrared band,we numerically calculated its application in narrow-band reflective filters.The narrow-band reflective filter proposed in this paper achieves an average reflectivity of 90% and an average Q value of 200 at the wavelength of the long wavelength infrared range.The average quality factor is 300,the dephasing time is only 1.7ps,and the insertion loss is only 0.4d B.At the same time,we simulated and analyzed the effect of the hexagonal rounded corners on the resonance which may appear in the experiment.(4)We have established a theoretical model of the micro-nano structure based on dielectric materials of the "lucky knot"(cross and ring)structure,numerically calculated and analyzed the type and characteristics of the resonance generated by the FDTD method,and numerically calculated the application of the structure on the optical refractive index sensor.The optical refractive index sensor proposed in this paper can achieve a high detection sensitivity of 986nm/RIU,an average figure of merit(FoM)value of 29,and an average Q value of 200 at the same time,and the dephasing time is only 1.8ps.At the same time,the micro-nano structure is insensitive to the polarization direction and the incident angle of the incident light,so it can realize the application of the device in a complex environment.And numerical simulation simulates the change of refractive index of glucose solution with a mass fraction of 20% at different temperatures,and the detection sensitivity can reach 1000nm/RIU.In addition,we also numerically simulated the change in refractive index of a glucose solution with a mass fraction of 20% at different temperatures,and the detection sensitivity can reach1000nm/RIU.(5)Through experiments,we have prepared a "lucky knot" structure array.Use vacuum magnetron sputtering coating system and plasma enhanced chemical vapor deposition(PECVD)system for thin film deposition of materials;use electron beam lithography,EBL)and traditional UV lithography system to realize the patterning of the structure;The Indutively Coupled Plasmon(ICP)system and the deep silicon etching system are used to complete the related etching process of Si.At the same time,the structure parameters are characterized by SEM.And we got the preliminary results of the spectrum test.