| Optical communication devices are an important support for the optical communication technology and even for the information industry.And the alignment motion accuracy of the optical channel in the packaging process directly affects the performance of the device and plays a key role in the development of the industry.With the continuous innovation and development of information technology,greater demands are being placed on the transmission rate,packaging volume,photoelectric integration degree and reliability of optical communication devices,thus,posing great challenges to the packaging technology of optical communication devices.The technical difficulties of the aligning units of an packaging equipment for optical communication devices lie in their centimeter travel,submicron accuracy,multiple degrees of freedom,small size and economical cost,and it is difficult for the existing motion modes or platforms to meet the above requirements at the same time.Therefore,this thesis studies the method and the technology for the design of the hybrid flexible motion platform of optical communication devices and works on the precise alignment of optical channels of optical communication devices without pose feedback:(1)The functional requirements of the hybrid flexible motion platform were explored and its mechanical structure was designed.Based on the Gaussian beam propagation theory,the coupling models of two typical coaxial optical communication devices are established,and the coupling transmission law is studied,and the travel and accuracy requirements on every degree of freedom of the packaging equipment for optical communication devices are clarified.By analyzing the characteristics of the coupling alignment motion of optical communication devices,a scheme using a hybrid flexible motion platform to achieve large stroke and high precision at the same time is proposed.By studying the motion division of series and parallel mechanisms,the form and driving mode of every dimensional motion are determined.A hybrid flexible motion platform with large stroke and high precision performance is designed,which is composed of a three-degree-of-freedom flexible parallel platform and a two-degree-of-freedom coplanar translation platform in series.In order to ensure the generation of large-stroke and high-precision motion of the flexible parallel platform,the motion properties of the flexible parallel platform were verified based on the spiral theory.Based on the beam and column theory,the force deformation model of the equalsection and corner-filleted large-stroke flexure hinge was established,and its effectiveness was verified by finite element software.(2)A position solution model of hybrid flexible motion platform without pose feedback is established.The differential motion analysis of robot was carried out,which provided a theoretical basis for the establishment of the kinematics model of hybrid flexible motion platform.The position solution model of the flexible parallel motion platform was established by finite element method and the flexibility matrix method,and the computational efficiency and effectiveness of the two were discussed based on the simulation results.Based on the pseudo-rigid body method and finite element simulation method,the relationship between the expected motion and the accompanying motion of the flexible parallel motion platform is discussed,and the coordination mechanism of every degree of freedom motion of the hybrid motion platform is obtained.Based on theoretical analysis and finite element simulation,the static stiffness and working space of the flexible parallel motion platform were determined.The influence of structural parameters on static stiffness and working space of the flexible parallel motion platform was studied,and the preferred structural parameters were determined.(3)The error generation mechanism of the hybrid flexible motion platform was studied,and the corresponding error compensation method was designed.Through the accuracy analysis of the hybrid flexible motion platform,the error source and geometric error measurement method were determined.The error model of the hybrid flexible motion platform based on position solution model is established,and the transfer law between the error parameters and the terminal pose deviation is obtained,and the accuracy level of the hybrid flexible motion platform is determined.Based on the Sobol method,the global error sensitivity of the hybrid flexible motion platform was analyzed,and the optimal accuracy distribution principle of error parameters was determined.By studying the identification and compensation methods of sensitivity parameters,the position solution model is optimized,and the error compensation scheme based on perturbation method is determined,which effectively improves the motion accuracy of the hybrid flexible motion platform.(4)A prototype of hybrid flexible motion platform was developed,and motion performance test experiments were carried out.According to the design requirements,a hybrid flexible motion platform prototype was developed;The precise motion control of the drive module based on local closed-loop was constructed,the multi-axis synchronous control based on the virtual spindle was adopted,the industrial control software based on the C# programming language was developed,and the flexible motion decoupling control strategy of the hybrid flexible motion platform without terminal pose feedback was determined.A test system of the hybrid flexible motion platform was established,and an error compensation experiment based on perturbation method was carried out,and the error interval after compensation was reduced to 31.1%～76.2% of what it was before compensation.The motion stroke,motion accuracy and trajectory tracking performance of the platform were comprehensively evaluated,and the design goals of multi-degree-of-freedom,centimeter stroke and submicron accuracy were realized.(5)A closed-loop control system based on optical power feedback was constructed,and an alignment coupling experiment of the optical communication device based on the hybrid flexible motion platform was carried out.By studying the optical channel automatic alignment scheme of the optical communication devices,a closed-loop control system based on real-time optical power signals from high-precision optical power meters is constructed.The optical search strategy that can realize the rapid and precise alignment of optoelectronic devices is determined.A search experiment of optical communication devices was established,in which the search success rate of the self-adaptive step width pattern search method reached 95%,which verified the motion performance of the hybrid flexible motion platform and the effectiveness of the closed-loop control strategy based on optical power feedback.In addition,test experiment for the coupling transmission law is also carried out,and the results show that the motion performance of the hybrid flexible motion platform can meet the requirements of the optical channel alignment of the optical communication devices. |
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