| Ultraviolet detectors are widely used in biological,medical,military,environmental and other fields.With the development of semiconductor materials and semiconductor manufacturing technology,UV detectors based on wide band-gap semiconductors have become a research hotspot in UV detection.Traditional wide-band gap oxide semiconductors,such as TiO2,Ga2O3,ZnO,NiO,etc.,are widely used in ultraviolet detectors,due to their various advantages,for example,different specific absorption wavelength ranges,diverse preparation processes,non-toxic and good chemical stability.However,one single semiconductor material also has its shortcomings.A short carrier life and a low mobility lead to low photocurrent and response,and internal defects lead to high dark current.This paper aims to improve the performance of a single wide bandgap oxide semiconductor ultraviolet detector by studying the heterojunction formed by a variety of perovskite materials and oxide semiconductors(TiO2 and In0.4Ga1.6O3).These perovskite materials include perovskite MAPbCl3,PbTiO3,CuTiO3,and La2Ti2O7.This paper mainly carries out the following research work.After forming heterojunction between perovskite MAPbCl3 and wide bandgap oxide semiconductor TiO2,the effect of MAPbCl3 on the performance improvement of TiO2 UV detector was studied.The properties of TiO2nanorods films grown by hydrothermal method on FTO were improved.The FTO/TiO2/MAPbCl3 UV detector by reverse temperature crystallizationwas prepared,and the horizontal structure of perovskite film and the vertical structure of nanowire array were formed.The photogenerated electron hole pairs are effectively separated at the heterojunction interface.The electrons drift along the nanowire,and the holes drift along the perovskite direction,which effectively prolongs the carrier lifetime,reduces the recombination and improves the photocurrent.At the same time,due to the characteristics of perovskite polycrystalline domains,multiple contact depletion regions formed by scattering carriers in the dark state can effectively reduce the dark current of the device(from 1.557×10-6 A to 2.69×10-10 A),and thus improve the light-to-dark ratio of the device(from 87.3 to 6.607×105),responsivity and detectivity.In addition,the mechanism of high performance of TiO2/MAPbCl3 heterojunction UV detector is described by theoretical analysis and parameter analysis.Study the effect of PbTiO3 and CuTiO3 on the performance improvement of TiO2MSM UV detector after forming heterojunction.The PN junction MSM structure UV detector of PbTiO3/TiO2 and the type Ⅰ heterojunction MSM structure UV detector of CuTiO3/TiO2 were prepared.The film by a sol-gel method has high yield,high chemical stability,and the dark current and response recovery characteristics of the UV detector with MSM structure are also superior.Contrast to characteristics of TiO2 MSM UV detector,both dark currents were significantly reduced(from 6.849×10-9 A to1.146×10-11 A,and from 4.11×10-8 A to 8.06×10-12A,respectively),and both response and recovery times were greatly reduced(from 1.02 s and 5.35 s to 65 ms and 81 ms,and from 1.84 s and 7.35 s to 78 ms and 93 ms,respectively).The mechanism of PbTiO3/TiO2 heterostructure is analyzed in detail.The spontaneous polarization of ferroelectric perovskite PbTiO3 can deplete the photogenerated carriers of TiO2,accelerate the separation and transport of electron-hole pairs,greatly improve the carrier collection efficiency and thus accelerate the response recovery characteristics of the device.CuTiO3/TiO2 constitutes the type I heterostructure.According to the band structure of Au/TiO2/CuTiO3/TiO2/Au under 0 V bias,biased in dark and under illumination,the potential well effect of CuTiO3 with type I heterostructure on photogenerated carriers is analyzed,and the photogenerated electron-hole recombination inside TiO2is effectively inhibited.Finally PbTiO3/TiO2 and CuTiO3/TiO2 UV detectors have low dark currents and faster response recovery properties.In order to develop the best overall performance of the UV detector,not only including the dark current and response recovery properties,but also the photocurrent,responsivity and light-dark current ratio and other properties.To study the effect of La2Ti2O7 on the performance of UV detector of single oxide semiconductor formed by layer perovskite La2Ti2O7 and wide band gap oxide semiconductor heterojunction.La2Ti2O7/TiO2 heterojunction MSM UV detector and La2Ti2O7/In0.4Ga1.6O3 heterojunction MSM UV detector were prepared.Contrast to characteristics of TiO2 and In0.4Ga1.6O3 MSM UV detectors,both photo-dark ratios were improved(from 266to 200943,and from 2349 to 79308,respectively),and both response recovery time is shortened(from 1.84 s and 7.35 s to 1.07 s and 2.48 s,and from 6.23 s and 4.81 s to 1.54 s and 2.35 s,respectively).Detailed mechanism analysis of La2Ti2O7/TiO2 and La2Ti2O7/In0.4Ga1.6O3heterostructures were carried out.The difference between theoretical and actual Schottky barriers was explained.The oxygen vacancy formed by In-doped Ga2O3 can increase the carriers and improve the photocurrent and responsivity.The interlayer space of La2Ti2O7 crystal structure contributes to the efficiency of separating photogenerated electron hole pairs and more charge carriers.Moreover,the netted TiO6 octahedral spatial structure and the micro-nanorod-like morphology are conducive to carrier transport,thereby improving the efficiency of photon absorption and the external quantum efficiency of the detector.In this paper,a variety of wide bandgap perovskite semiconductors are developed to improve the performance of traditional oxide semiconductor UV detectors.The improvements in dark current,photocurrent,response recovery speed,gain,responsivity,detectivity,noise and external quantum efficiency of the devices are analyzed.This paper provides a valuable reference for the development prospect of wide bandgap perovskite semiconductor materials in ultraviolet detection. |