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The Technology Research Of Waveguide X-ray Scintillation Screen

Posted on:2011-03-02Degree:MasterType:Thesis
Country:ChinaCandidate:H LiuFull Text:PDF
GTID:2120330332457421Subject:Microelectronics and Solid State Electronics
Abstract/Summary:PDF Full Text Request
The X-ray has been widely used on scientific research, production, life and many other fields, as it has high photon energy, penetration and other characteristics. But recently the X-ray imaging detector has a lot of problems, such as low resolution imaging, large dose of X-ray and so on. In order to optimize the spatial resolution and reduce the dose of X-ray, this article studies for the Several of these key technology of the waveguide X-ray Scintillation Screen.The Scintillation Screen is based on the silicon micro-channel array. CsI(T1) is used for the scintillation crystal as the light conversion materials, and filled in large array holes to come into being waveguide. Then the whole system is formed a scintillation Screen. The silicon micro-channel array can inhibit the diffusion of the visible light, and also can raise the luminous efficiency.In this article, the silicon micro-channel array is manufactured with electrochemical etching equipment at first. And then scintillation crystal materials--CsI(T1) is chosen which is suitable for this subject by the different nature of the scintillation crystal. Then a method of high-temperature melting-closed cooling brought forward to make the CsI(T1) fill in the large holes, according to the different melting point between CsI(T1) and silicon, and the waveguide is formed. Because the length of the waveguide can affect the luminous efficiency, but the shape of the section can not. So the cuboid waveguide is replaced by the cylindrical waveguide. At last a photoeffect model and a Compton scattering model are set up to the waveguide. The waveguide dimensions is got when the luminous efficiency is reached by 80%, through analysis and using matlab to simulate luminous efficiency. The waveguide dimensions is L≈400μm,D≈12μm.
Keywords/Search Tags:scintillation crystals, electrochemical etching, micro-channel array, X-ray imaging detector
PDF Full Text Request
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