| With the development of technology, thin-film devices are widely used. From household appliances to aerospace vehicle, the application of thin-film devices can be found almost everywhere. .Devices with film-substrate structure always play important roles in many equipments,the instability of the film-substrate structure affect the capability and the service life of the whole equipment. As a result, buckling-the most common failure mode draws a growing number of researchers attention .The study of buckling under static load has got a lot of achievement both theoretical and experimental, however ,in the real productivities devices with film-substrate structures mostly work under the dynamic load Under this circumstance, theory of buckling under static load shows it's limitation when there is dynamic load working, thus the special study of buckling behavior under dynamic load has an important significance.The Specimen used in this paper is made by PMAA, with titanium thin film deposited on it, dynamic load is applied on the specimen. We designed a new system specially for fatigue loading,the new system is based on piezoelectric ceramics (PZT)and integrated a force-displacement measure module. Loading frequency and loading cycle index is controlled by a computer, a CCD camera is applied to record the whole process .By the high performance of this system, we implemented several thousands times cycle load on one single specimen, recorded the process of buckling expansion; we used the hammer impact load system applied dynamic impact load on specimen with different film thickness, we set several groups experiments to analysis the relationship between parameters such as the film thickness,the cycle times and impact force and the buckling. In this experiment we almost got the entire typical experimental phenomenon with impact load. At the end of the paper, we explained some of the experimental phenomenon using the stress wave theory and the energy release rate.
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