Set Up A Cathode Research Device Connecting With XPS/AES

To find a proper and convenient way in electron emitter research, in the paper, We have discussed the essential and possibility of setting up a new PLD (pulsed laser deposition) device which connects with AES (Auger energy spectra), and built such device in order to complete cathode deposition and analysis without exposing to the atmosphere and carried out cathode in-situ preparation and analysisElectron emission phenomenon is a physical process taken place in surface of electron emitter. The emission surface is composed of active elements which reach a dynamic balance system determining the capability of cathode. Therefore, surface analysis is necessary for cathode researches .PLD is one of the best ways to deposit film and has some merits over other preparation technique. By means of PLD, it is easy to achieve ingredient homology between film and target. Moreover, the deposition experiment condition is easy to control with a high deposition rate, a short deposition cycle and a wide application. In a word, PLD can be met with the cathode research requirements which need less quantity, more batches, and higher quality.AES is a important analysis in surface study and has many advantages in cathode research .The quadruple frequency YAG laser made in China is cheap and steady. This kind of laser can output two beams of green and violet. After focused, the laser beam is totally meted with the requirements of PLD. Compared with excimer laser, YAG laser have higher efficiency.By means of modifying the vacuum chamber of AES, the research has realized the joint between AES and PLD. That is, it has realized the in-situ deposition and in-situ analysis in cathode. The total system comprise laser, external ray system, vacuum chamber, AES and emission electron surveyor. Through this device, La -Mo cathode was deposed and analyzed without exposed to the atmosphere. The experiment has proved that system is efficient.