Study Of Nanometer Thin Film By Pulsed Laser Deposition, Growth Condition And Correlative Capability

Nanocrystalline diamond thin films and diamond- like thin films have been prepared by pulsed laser depositing technical. In this paper, we primarily studied the effect of substrate temperature, laser energy and gas pressure on the growth of the thin films, and the growth mechanisms of nanocrystalline diamond films have also been analyzed by us. The second harmonic produced by a Q-switched Nd:YAG laser with wavelength of 532 nanometers(nm), repeating frequency 1 or 5Hz, single power per pulse 100mJ～200mJ and pulse width τ=10 nanoseconds(ns) was used. Thin films were deposited on sapphire and single-crystalline silicon substrate. The results is shown that the sample which deposited at 5500C and under oxygen pressure 4～6Pa and with single power 170mJ pre pulse have presented character of nanodiamond thin film. The film is composed of hexagonal and cubic diamond grains, which is arranged of 10nm～20nm. Moreover, we have analyzed the action of oxygen atmosphere in PLD system, which afforded much beyond equilibrium oxygen atom occurring, the simple graphite can be translated activation graphite which is metastable phase contrasted to diamond, so the diamond syntheses in the thermodynamics is viable. The substrate temperature plays an important role in the process of film growth. With the temperature changed, the film had shown diamond-like character. Furthermore, we have also primarily studied the mechanics and transmittances- increasing single layer capability of diamond-like thin films.The thesis is organized as following: The charterⅠintroduced the schematics of the experimental setup and summarized the action of pulsed laser deposition. In charterⅠ, we described the growth fashion of nanometer thin films and discussed the growth mechanism of the nanocrystalline diamond thin films. The samples were characterized by scanning electron microcopy(SEM),X-ray diffraction(XRD),micro- Raman spectroscopy and atomic force microscopy(AFM), respectively. The preparing of nanometer thin films and the influenced of growth condition were studied in charter Ⅱ. The evolutions of microstructure and micrograph with the variation of substrate temperatures were given. We focused on the dependence of substrate temperature and analyzed the circumstances in theory. The samples were also characterized by all kinds of measures. In charter Ⅲ, the thermodynamics action of oxygen atmosphere in the pulsed laser deposition system was synthesized and the action of hydrogen atmosphere in chemical vapor deposition was contrasted. The activation temperature and substrate temperature are two key parameters for diamond growth in the vapor phase under low pressure. The mechanics and transmittance - increasing layer capability of the thin films were studied in charter Ⅳ. All the samples were measured by nano-indentor and Fourier transform infrared (FTIR) spectroscopy. In this paper, the importance of experiment data and elementary theory were offered in the study of nano-crystalline diamond films and diamond-like films. As function materials, there is more significance in utility in the future.