Fabrication And Structure Studies Of Nano Co:BaTiO₃ Composite Thin Films By Pulsed Laser Deposition

In this work, the mechanism and characteristics of pulsed laser deposition have been expounded, and Monodispersed cobalt nano-thin films and Nano Co:BaTiO3 composite thin films were grown by Pulsed Laser Deposition(PLD). The deposition conduction and its effect on thin film surface morphology were analyzed and mechanism of forming particles were also discussed. At the same time the structure and growth characteristic of Nano Co:BaTiO3 composite thin films were been studied in detail. The main results are as follows.1. the principle, characteristics and actual state of a view about pulsed laser deposition method were presented. The development and trends of this new technique were discribed emphatically.2. Nano Co thin films on single crystal silicon(l11) were successfully fabricated by PLD in a hydrogen background gas. The deposition conduction and its effect on thin film surface morphology were analyzed and mechanism of forming particles were also discussed. These results show that under lower background gas environment it inclined to form droplet because the collision among plasmas themselves is prominent, while form isle and then agglomerate particles under higher background gas environment. Monodispersed cobalt nanoparticles grow at a repetition rare of 4Hz and 5Pa background gas.3. Nano Co:BaTiO3 composite thin films on single crystal magnesia(100) were successfully fabricated by pulsed laser depositioa The morphology and microstructure of the thin films were investigated via Atomic force microscope (AFM), X-raydififractometer (XRD) and Raman spectrum. The results show that thin films have highly c-axis oriented tetragonal phase. The surfaces of the thin films were uniform, compact and of atomic smoothness (RMS=0.15nm). The Co particles, of monodispersed distribution, were found to be well dispersed in the matrix BaTiO3. With the increase of Co crystalline, the intensity of Raman peaks weakened and its width increased.