The Engineering System For Detecting Earthquake Acceleration Based On Micromachined Accelerometer

China is one of the countries suffered the most severe earthquake disaster. To relieve the earthquake disaster of engineering structure, we must understand the characteristics of strong earthquake motion and strong motion observation is the most important method to solve the problem mentioned above. With the rapid development of electronic and computer application technology, the technical characteristics of seismic surveillance instruments are improving increasingly.At present, the vibrometer technique is developing quickly, the vibration can measure acceleration and displacement. But this instrument has many disadvantages such as low accuracy, narrow frequency range, bad overload capacity, high price and large volume. Advanced by the new-high technology and draught by the strong market demand, various micro sensors and MEMS made on the basis of integrated circuit technology and micro machining processing technology come to the force in the competition. MEMS is the abbreviation of the Micro Electro Mechanical Systems. MEMS is the frontier technology in the 21st century, it is based on the micro technology and nanotechnology being designed, processed, measured and controlled. MEMS can make mechanical component, optical system, driving member and electric control system to be an integral microsystem. It can not only collect, disposal, and send information or command, but also autonomically take action by the obtained information and external command. We adopt the new pattern micro-electromechanical accelerometer with high accuracy made in ADI Company on April 23,2003 to complete checking the earthquake event.Mainly based on the development situation of micro-accelerometer, in this paper we design an earthquake monitoring system with technicality and...