Preparation And Photoinduced Hydrophilicity Of Nitrogen And Tungsten Co-doped TiO₂ Thin Films By Reactive Magnetron Sputtering

TiO₂ materials are attracting lots of concerns for the two major properties of photoinducedhydrophilicity and photocatalitic. At the meantime, much more concerns are received as well forthe complex effects of such two properties in application. The defect existing for bothphotoinduced hydrophilicity and photocatalitic of pure TiO₂ materials is that they could only beinduced by ultraviolet radiation, while useless by visible radiation. However, there is only 5% ofultraviolet radiation in the sun light, which greatly restricts the application of TiO₂ materials.With the modification of M doping, the photoinduced hydrophilicity and photocatalitic of TiO₂can be induced under visible light to a certain extent, where M means anion or cation.For the first time, with compound ceramic as target, W-doped and N/W co-doped TiO₂ thinfilms were prepared through magnetron sputtering method. The properties includingphotoinduced hydrophilicity of TiO₂ thin films were characterized by AFM, Raman, UV-Vis, andXPS. The results are as follows: 1) W-doped and N/W co-doped monolayer TiO₂ thin films couldbe prepared by magnetron sputtering with compound ceramic target successfully.2) The asprepared TiO₂ thin films were compound structure of rutile and anatase with even particle. Theabsorption onset of the modified films red shifted to the visible region compared to the pure TiO₂thin films, especially for the co-doped films with the absorption onset of 470nm. W existed asW⁵⁺ and W⁶⁺, while N asγ-N (N-O) in the N/W co-doped TiO₂ films.3) The contact angle ofN/W co-doped TiO₂ film failed to 10°after exposures under xenon-mercury lamp for 30min,which was better than pure TiO₂ films with the contact angle of 26°.At the same time, Pilkington Activ ^TM Glass implanted with vanadium ions with differentenergy and doses were studied. The results suggested that implanted vanadium ions couldeffectively improve the photoinduced hydrophilicity of Activ ^TM Glass and the photoinducedhydrophilicity are better for those with higher energy and dose in the samples we prepared.