Simulation Of A Radio-frequency Capacitively-coupled Plasma With Fluid/Monte-Carlo Method

In this paper, a self-consistent fluid model for an argon in capacitively-coupled, radiofrequency discharge is presented. The model contains the particle balance for electrons andions and the electron energy balance, coupled with Poisson equation. Based on the electronfield from the fluid model, with Monte-Carlo method, the ion energy distribution(IED) andthe ion angular distribution(IAD) at the electrode by the collision is studied.For the 1D and 2D fluid model, the main plasma parameters, including the electronnumber density, the ion number density, the electric field, the electric potential, thedisplacement current, the electron current and the ion current, are studied. Comparison of thetwo models, the principle difference is that the two dimensional simulations are able tocapture the asymmetric axial profiles, such as the ion number density.Furthermore, the effect of various gas pressure and driven voltage on IED and IAD at theelectrode is studied. It is found that when the gas pressure grows, the peak of energydecreases and the incident angle becomes larger. In the contrast, when the driven voltagegrows, the peak of energy decreases and the incident angle becomes smaller. Different fromone-dimensional model, the IED has the third peak, and the IAD has a new peak in thetwo-dimensional model. The peak becomes more evident, when the position is far away fromthe central axis at electrode.