The FEA And Design Of Vacuum Vessel For Special Deposition Facility

Vacuum evaporation deposition composed of Physic evaporation deposition (PVD) and Chemical evaporation deposition (CVD). Due to the perfect quality and without waste liquid was discharged; this technology was widely used in the production and study of thin film.The development of Special Deposition Facility (SDF) is the subject of this discourse. The design of the vessel is determined by two main constraints: the requirement from physic and the vacuum requirement for the operation. The best meet scheme is rectangular vessel with cooling jacket. After the detain structure design was completed, the vacuum system of SDF was carried out. In this part, the type and capability of main pump was selected, as well as some effective measure was adopted to control the pollution of pump oil. Moreover, Roots Vacuum Pump and Rotary Vacuum Pump are decided as pump before main pump.The chief strengthen thickness, such as the thickness of inner shell and outer shell S1&S2, the thickness of enhance ribs S3, the thickness of the door S4, is optimized, through APDL program. After that the precious stainless steel is saved and the cost is reduced.With the development of our research, the vacuum vessel becomes more and more complicated. The method by rule couldn't get the precise result of stress and strain for vessel. In this paper, the FEA, which is one of advance technology, is applied to investigate stress and strain of the vessel. Firstly, half of the vessel is modeled by PRO/E, as vessel is symmetric about YZ. Then, the 3-D model is introduced to ANSYS and meshed, after that the FEA model is made out. Thirdly, the loads and boundary conditions are applied on the FEA model. Fourthly, finite element analysis was carried out. The results of the stress analysis are obtained in terms of Von Mises equivalent stress and displacement of the vessel. The structural verification is presented according to JB4732-1995. In addition, a buckling analysis is carried on.