The Plasma Diagnostics Research Of Film Coating

As "the fourth material state", plasma is studied and used in modern times by people. From the industrial coating, etching, carburizing, and other processing methods to the research of aerospace field of the space status and so on, plasma is closely related to them. In order to research better on the plasma, it is necessary to master the method of getting plasma parameters. As a plasma diagnostic method and tool which occurred in the 1920s, Langmuir probe has simple equipment, easy-to-use features, and its diagnostic capability is also relatively strong, and one can get rich information from the diagnosis, and the scope of its application mainly in the field of low-temperature low-pressure plasma is gradually expanding.This article is mainly based on the sputtering process of crossing the plasma membrane of the study, through the plasma diagnostic techniques to measure and understand the plasma particles can be in the distribution of the film can be controlled to achieve growth. The main work is to design the two probes, the first single-use Langmuir Probe, the second is the Emissive Probe. According to two different probe design a probe related to the diagnostic electrocircuit. The diagnostic electrocircuit is mainly including probes, sensors, signal generators, power amplifiers and data acquisition card and other components. The diagnostic electrocircuit of Emissive Probe also includes heating circuit.This article is based on the experimental film sputtering process of crossing the vacuum coating machine in the plasma for diagnosis. The experimental work of the two probes includes the design and related diagnostic circuit design, and experimental conditions, steps, such as the process. This article includes single-probe method and zero emission of two experiments. Langmuir single probe diagnostics is characterized by a simple diagnostic methods, estimates more parameters, but because of single-probe diagnostics in theâ… -â…¤characteristic curves of the inflection point will not be obvious, space plasma potential is determined Difficulties, we also adopted a zero emission, the main purpose of this method is for the space plasma potential for diagnosis and measurement. In experiments in this paper and on the basis of experimental data obtained for analysis and calculation shows that the number of plasma and plasma parameters of the Characteristicâ… -â…¤curves.