Electromechanical Collaborative Simulation For Feed System Of Wafer Grinder Based On The Virtual Prototyping Technology

Silicon wafer is an important substrate material of IC chips manufacture. During the process to turn silicon ingot into the integrated circuit chips,ultra-precision grinding is mainly used in planarization for in silicon wafer preparation and back thinning in the backend of semiconductor manufacturing process. With the development of high intergration and performance, there is a new challenge for ultra-precision wafer grinder to get both supersmooth surface without scathe and grinding efficiency.The ultra-precision feeding system is the key part of wafer grinder,and also a kind of mechano-electronic product.lt must have good structure static and dynamic performance to improve the processability and kinematic accuracy.This paper analysed the dynamic performance of the feeding system with virtual prototype, finite element analysis and electromechanical collaborative simulation technology.The main contents of the paper are as following.Firstly,this paper introduced the research situation of wafer grinder,the performance requirement of feeding system and the research situation and development trend of electromechanical collaborative simulation technology and virtual prototype technology.Secondly,this paper analysed the structure feature of feeding system, decided the structure designment;established the feeding system model of wafer grinder with Pro/Engineer;designed ultraprecision positioning and speed control program.Thirdly, this paper analysed the modal of ballscrew as the key part with ANSYS established a rigid-flexible multi-body dynamics model for feeding system in the virtual prototype software ADAMS, and analysed the movement characterstics of the feeding system.Fourthly,this paper intergratedly considered the influence come from flexible screw and contact stiffness,calculated the contact stiffness between screw and nut,guide and slide block,screw and bearing;analysed the forced vibration source of the feeding system,made vibration simulation analysis based on the rigid-flexible multi-body model with ADAMS/Vibration,and got vibration modes of the system and the frequency response function at the grinding wheel.Finally,this paper designed the electromechanical collaborative simulation program based on ADAMS and MATLAB/Simulink,established the math model of servo control link,deduced the transfer function of the control loop,set up the model of the feeding system for electromechanical co-simulation,and tuned PID parameters of the control link with response waveform; simulated the feed movement at low speed and verified the feasibility of the feeding system designed.