Research On The Device Of Micro-edm With Usm In Inverted Layout

As the advances of science, technology and industrial production, and the development of Micro Electro-Mechanical System(MEMS), mechanical parts with large aspect ratio deep-micro-holes are widely used. Micro-EDM has been widely used because of its non-contact and easy to achieve such a large aspect ratio features. Micro-hole EDM is micro-EDM technology as well as micro-manufacturing technology, the micro and deep extent are important indicator of micro-manufacturing capacity. Achieving the machining of large aspect ratio deep-micro-holes will play an important role in promoting micro-EDM technology and micro-manufacturing level in our country.The important reasons for preventing the processing depth and speed in micro-hole EDM are the sedimentation and accumulation of electrical discharge products in the bottom of holes. In order to achieve the machining of large aspect ratio deep-micro-holes, a new method called micro-EDM with USM in inverted layout is proposed, which is machining micro-deep-holes with micro-EDM in inverted structure layout, combined with the ultrasonic vibration of workpiece or electrode.The machining principle, characteristics and significance of inverted layout are summarized, a device of micro-EDM with USM in inverted layout, mainly the mechanical system, servo control system and micro-energy pulse power which is the three most crucial units, is designed. For the mechanical system, the general functional components design and dedicated functional components design of the equipment are accomplished, and solutions for the technical difficulties are proposed. Based on the "PC + PMAC motion control card" structure, a high-performance servo control system is established, the hardware circuit and servo-control strategies and software are designed. Based on MOSFET, a controllable RC Micro-energy pulse power is completed.The machining experiments prove that the new method called micro-EDM with USM in inverted layout which is innovatively proposed and the device of micro-EDM with USM in inverted layout, can radically resolve the problem of sedimentation and accumulation of electrical discharge products in the bottom of holes, which can achieve the machining of large aspect ratio deep-micro-holes with high quality, high speed, high precision and high stability.