Research On Phase Transition Property Of Vanadium Dioxide Thin Films

VO2 is a promising material in a great number of potential applications. Many studies have been conducted extensively during the past decades, especially in the film preparation technology. Some new preparation methods have prepared high capability VO2 film, such as organic sol~gel method, pulse laser deposition technology, MOCVD. However, most preparation methods show some disadvantages. For example, the above techniques utilize vanadium, pure V2O5 and vanadium alkoxide as precursor which is expensive or unstable, and not available in the market. So far, there is not researcher who has prepared eminent capability VO2 thin films use industrial V2O5 as material, hi the conditions that the industrial ViOs available and inexpensive, such as the Panzhihua iron and steel company produce ViOs 6000 tons per year, occupy the primary inland, but its use is localized in iron and steel industry and chemistry industry, therefor preparing VO2 thin films with broad purpose use with Panzhihua iron and steel company's industrial V2O5 and researche its capability look highly imminence and needed.Prepare VO2thin films with inorganic sol~gel method in this paper. And research some aspects as follows:(l)The technical parameter range for preparing rather excellent VC^thin films.(2)Three orthogonal experiments was conducted to prepare some groups films in this paper, and investigate the effects of heating treatment temperature, heating treatment time, film thickness on the film's resistance break orders in the process of vacuum heating treatment and deoxidized with H2 during preparing VO2 thin films.(3)The V2O5 thin film,The V2O5 gel and VO2 thin films are studied by electricity lens,TG and DSC ,XRD methods.(4) Inorganic sol-gel method is compared with some other usually used prepartion technicals in this paper.According the research, the VO2 thin films with excellent properties are prepared ,its phase transition temperature is about 35℃,lowed the pure VO2 thin films' phase transition temperature( 68癈) by 33℃,its resistance break order is about 2~3,and its phase transition temperature lag is about 1~2℃, Have reached world level of resistance break of similar VO2thin films which prepared with the pure chemical of vanadium as raw material.