Study On Dielectric Properties And Humidity Sensing Mechanism Of Nanometer BaTiO₃ Humidity Sensor

Humidity monitoring and controlling are more and more emphasized on industry, agriculture, daily life, science etc. Studies on material, structures, properties and humidity sensmg mechanism of humidity sensors are increasing. Resistive-type and capacitive-type humidity sensors were discussed individually. In this paper, these two kinds of humidity sensors were made in nanometer BaTiO3. Their properties were analyzed and compared. It is a reference for choosing suitable structure according to different uses. Further more, dielectric properties and humidity sensing mechanism of resistive-type and capacitive-type humidity sensors of nanometer BaTiO3 were investigated.The humidity sensors of the same material (nanometer BaTiO3 ) with two kinds of structures were studied. Firstly, resistive-type and capacitive-type humidity sensors were made from nanometer BaTiO3 respectively. Secondly, electronic parameters, such as capacitance(C), resistance(R), complex impedance (Z) and dielectric loss (D), were measured at different relative humidities (RH), frequencies and temperatures by LCR intelligent meter. Curves of R-RH, C-RH, |Z|-RH, D-RH, humidity hysteresis, response-recover time etc, were obtained from experiment data by Origin and curves obtained at different frequencies and temperatures were compared. Finally, dielectric properties and loss of humidity sensing material and humidity sensing mechanism of humidity sensors of these two kinds of structures were discussed particularly on base of curves of properties of humidity sensors and theory of dielectrics physics.Developing with all kinds of theory and experiment equipment, this study will be carried on.