Study On The Preparation Of Orientated Deposition And Magnetic Properties Of NdFeB/X/Ti Thin Films

Preparation craft of orientated deposition techniques, configuration of surface, and magnetic properties of NdFeB/X/Ti thin films were studied mainly. To acquire NdFeB/X/Ti thin films of good magnetic properties, orientated deposition techniques were used to make surface of thin films form orientated columnar crystals, and the mechanisms of good magnetic properties was explained. NdFeB/X/Ti thin films were deposited by DC and RF magnetron sputtering techniques. The properties of thin films were characterized by several analysis techniques, such as AFM, VSM, XRD, TEM and so on. The results show that NdFeB/Ti thin films prepared by orientated deposition techniques were crystalline, because orientated deposition techniques are that thin films are heated by proper way in sputtering, and temperature of thin films being sputtered increases from 400℃ to 500℃. AFM shows that NdFeB/Ti thin films prepared by orientated deposition form columnar crystals of single direction, which direction is perpendicular to films' surface. NdFeB/Ti thin films of orientatedly columnar crystals have good magnetic anisotropic property.NdFeB/Ti thin films prepared under proper craft of orientated deposition were heat-treated at different temperature and tested by AFM, XRD, VSM and so on. The results show that configuration of surface of NdFeB/Ti thin films prepared by orientated deposition techniques changes with the change heat-treat temperature, as heat-treat temperature below 500°C, thin films' grain refines with the increase of heat-treat temperature, as heat-treat temperature above 500°C, thin films' grain coarses with the increase of heat-treat temperature. As heat-treat temperature is 500°C, the magnetic properties of NdFeB/Ti thin films prepared by orientated deposition techniques are best relatively. The heat-treat has no obviously improvement for the coercitive force of NdFeB/Ti thin films prepared by orientated deposition techniques, the coercitive force has been perfect relatively. The magnetic properties of NdFeB/Ti thin films prepared by orientated deposition techniques has no obviously improvement. The orientated deposition techniques is a practical and effective way for preparing magnetic thin films, its unique merit is thin films are heated in sputtering without heat- treat, and have good magnetic properties.