Development Of The Key Components And The Pressing Force Control System Of The RYJ-Ⅱ Hot-embossing Equipment

Along with the development of the polymer microstructures in the micro-technology field, the technologies of manufacturing of the polymer microstructures receive rapid development. Hot-embossing technique for fabrication polymer microstructures, which was already used in the production of polymer microfluidic devices, polymer micro optical components, and etc, has good potential in application. The hot-embossing block, the precision leveler and the hardware of the pressing force control system of the RYJ-II hot-embossing equipment were designed. Finally the pressing force uniformity between the two hot-embossing surface was analyzed.The hot-embossing block of RYJ-II hot-embossing equipment was designed and manufactured. Manufacturing it including manufacture the hot block, the heat insulation block, the constant temperature block and the design of the cooling oil circulation system and so on. Using the ANSYS software simulates the heat up process and the temperature differences between the hot-embossing surface and the thermometer. Unparallel of the two hot-embossing surface usually causes the pressing force ununiformity between the two hot-embossing surface, then causes the bad quality of the polymer microstructures. To resolve this problem, a precision leveler under the lower hot-embossing block was invented. The formulae of the adjusting angle to convenience the leveling process were calculated. Leveling experiments were done. Finally actualize the parallel of the two hot-embossing surface. The hardware system of the pressing force and displacement control system were designed. The pressing force control range is 0 to 50KN and the displacement control range is 0 to 200mm. Utilizing the PID controller actualize the accurately control of the pressing force and the displacement. The experiments prove that the pressing force control precision is below +40N and the displacement error is less than lum. Analyses the factors that influence the pressing force uniformity between the two hot-embossing surface. Using the limited element method software ANSYS simulates the pressing force distribution under the case of flatness error and parallelism error. Bring forward the relative pressing force difference to define the pressing force uniformity. Have figured out the relative pressing force differences at the case of the flatness error and the parallelism error. The simulations indicate that the larger the pressing force between the two hot-embossing block, the better the pressing force uniformity.