Preparation And Investigation Of TiN/(Ti, Al)N Composite Multilayers

Single layer (Ti, Al)N and TiN/(Ti,Al)N composite multilayers under different pulsed bias voltages are synthesized by pulsed bias arc ion plating on HSS-A1 and Crl2 substrates. Surface morphologies of single layer (Ti,Al)N are observed by SEM and AFM, the phase structures of TiN/(Ti, A1)N composite multilayers are analyzsed by XRD, the hardnesses of composite multilayers are messured by Vickers hardness instrument.The number of macrodroplets on the film surface decreases when increasing the pulsed bias voltage, and the surface becomes more smoother by SEM and AFM.Through the SEM cross section of TiN/(Ti,Al)N multilayer, we can get that the interfaces between layers are clear , smooth and the thicknesses are uniform.energy dispersive X-ray spectrometers that Al concent in the film incresses with increasing the pulsed bias voltage, and then decreases, at the 150V, it reaches a maximum of 36. 41at%.XRD spectrums of TiN/(Ti, Al)N composite multilayers show that, pulsed bias voltage stongly influences the preferred orientation .The microhardnesses of TiN/(Ti,Al)N composite multilayers show that,the film microhardness increases with increasing the pulsed bias voltage, and reaches a maximum at 150V, and then decreases.